From nppatil at snf.stanford.edu Tue Sep 2 17:28:04 2008 From: nppatil at snf.stanford.edu (nppatil at snf.stanford.edu) Date: Tue, 2 Sep 2008 17:28:04 -0700 Subject: Problem tylan2 SNF 2008-09-02 17:28:03: Boat Loader Message-ID: Quartz plate scratches sides of furnace tube while loading and unloading. From latta at snf.stanford.edu Wed Sep 3 10:38:15 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 Sep 2008 10:38:15 -0700 Subject: Comment tylan2 SNF 2008-08-30 07:59:48: performing TLC clean Message-ID: thanks for the heads up From latta at snf.stanford.edu Wed Sep 3 15:25:37 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 Sep 2008 15:25:37 -0700 Subject: Problem tylan2 SNF 2008-09-03 15:25:35: Mixing chamber sticking... Message-ID: to the side of the tube, which pushes the boat out of the hot zone sweet spot. From latta at snf.stanford.edu Wed Sep 3 15:26:13 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 Sep 2008 15:26:13 -0700 Subject: Problem tylan2 SNF 2008-09-02 17:28:03: Boat Loader Message-ID: added a more detailed problem note From latta at snf.stanford.edu Wed Sep 3 17:10:03 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 Sep 2008 17:10:03 -0700 Subject: Comment tylan2 SNF 2008-09-03 17:10:02: Sept quals Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 989A (expect about 1000A) Within-a-wafer = 0.7% (expect less than 5%) Wafer-to-wafer = 1.4% (expect less than 5%) From latta at snf.stanford.edu Wed Sep 3 17:10:14 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 Sep 2008 17:10:14 -0700 Subject: Comment tylan2 SNF 2008-08-07 16:54:46: Aug Process Quals Message-ID: Archived! From tberg at snf.stanford.edu Thu Sep 4 07:28:42 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 4 Sep 2008 07:28:42 -0700 Subject: Shutdown tylan2 SNF 2008-09-04 07:28:41: Trying to adjust baffles etc Message-ID: From seymour at snf.stanford.edu Thu Sep 4 12:38:05 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 4 Sep 2008 12:38:05 -0700 Subject: Shutdown tylan2 SNF 2008-09-04 07:28:41: Trying to adjust baffles etc Message-ID: Tube warped, unable to adjust loader so as to not drag on top or bottom. Replaced the tube and checked loader flag. heating up now and will start a Tran LC clean when tube hot enough to start. From seymour at snf.stanford.edu Thu Sep 4 12:38:46 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 4 Sep 2008 12:38:46 -0700 Subject: Problem tylan2 SNF 2008-09-04 12:38:45: running TRANLC clean after tube replacement Message-ID: From tberg at snf.stanford.edu Tue Sep 9 06:08:43 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 9 Sep 2008 06:08:43 -0700 Subject: Problem tylan2 SNF 2008-09-04 12:38:45: running TRANLC clean after tube replacement Message-ID: tlc completed From tberg at snf.stanford.edu Tue Sep 9 06:09:00 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 9 Sep 2008 06:09:00 -0700 Subject: Problem tylan2 SNF 2008-09-03 15:25:35: Mixing chamber sticking... Message-ID: tube changed