Problem tylan2 SNF 2009-02-26 06:24:42: one wafer cracked

jwpchen at snf.stanford.edu jwpchen at snf.stanford.edu
Thu Feb 26 06:24:43 PST 2009


found one process wafer (new wafer) cracked... can see one piece remain near door end of tube, does not interfere with moving parts from what I can tell




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