From kimsangb at snf.stanford.edu Mon Jun 1 22:19:22 2009 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Mon, 1 Jun 2009 22:19:22 -0700 Subject: Problem tylan2 SNF 2009-06-01 22:19:21: vacuum wand does not work Message-ID: The spring pulls the button in instead of pulling it out. From tberg at snf.stanford.edu Tue Jun 2 06:24:28 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 2 Jun 2009 06:24:28 -0700 Subject: Problem tylan2 SNF 2009-06-01 22:19:21: vacuum wand does not work Message-ID: replaced vacuum wand From latta at snf.stanford.edu Wed Jun 3 10:28:04 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 Jun 2009 10:28:04 -0700 Subject: Comment tylan2 SNF 2009-06-03 10:28:04: June quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 951A, Std Dev = 4.2 Front Center = 984A, Std Dev = 5.7 Back Center = 1008A, Std Dev = 5.0 Back = 1027A, Std Dev = 5.2 Average All = 993A These results are almost identical to the May quals, creeping towards out of spec. From latta at snf.stanford.edu Wed Jun 3 10:28:17 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 Jun 2009 10:28:17 -0700 Subject: Comment tylan2 SNF 2009-05-14 15:55:29: May re-qual Message-ID: archived From latta at snf.stanford.edu Wed Jun 3 10:28:37 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 Jun 2009 10:28:37 -0700 Subject: Comment tylan2 SNF 2009-05-14 15:56:49: re-qual a lot like original May quals Message-ID: so are June's quals. From seymour at snf.stanford.edu Thu Jun 4 10:28:49 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 4 Jun 2009 10:28:49 -0700 Subject: Comment tylan2 SNF 2009-06-04 10:28:49: uniformity issues Message-ID: I removed the loader and checked loader attachment parallelism to tube. Moved door up slightly to better catch door seal. needs test after repair. From seymour at snf.stanford.edu Thu Jun 4 10:29:19 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 4 Jun 2009 10:29:19 -0700 Subject: Problem tylan2 SNF 2009-06-04 10:29:18: needs test after repair Message-ID: From latta at snf.stanford.edu Thu Jun 4 18:01:37 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 4 Jun 2009 18:01:37 -0700 Subject: Comment tylan2 SNF 2009-06-04 18:01:37: June re-qual after door realignment Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 964A, Std Dev = 4.1 Front Center = 984A, Std Dev = 4.4 Back Center = 1004A, Std Dev = 3.8 Back = 1018A, Std Dev = 3.8 Average All = 993A A bit better. From latta at snf.stanford.edu Thu Jun 4 18:01:59 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 4 Jun 2009 18:01:59 -0700 Subject: Problem tylan2 SNF 2009-06-04 10:29:18: needs test after repair Message-ID: see re-qual in comments From damodei at snf.stanford.edu Wed Jun 10 04:53:14 2009 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Wed, 10 Jun 2009 04:53:14 -0700 Subject: Comment tylan2 SNF 2009-06-10 04:53:13: Wand chipped Message-ID: Noticed chip in vacuum wand. Wand was fine as recently as Monday. From narii at snf.stanford.edu Thu Jun 11 15:02:06 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Thu, 11 Jun 2009 15:02:06 -0700 Subject: Problem tylan2 SNF 2009-06-11 15:02:05: Water inside of the tube Message-ID: After running wet700, there was water inside of the tube. Plus, temperature hit 750C while running wet700 recipe. (Still it said temperature is good.) From latta at snf.stanford.edu Thu Jun 11 15:15:38 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 11 Jun 2009 15:15:38 -0700 Subject: Comment tylan2 SNF 2009-06-03 10:28:04: June quals Message-ID: archived after re-qual From latta at snf.stanford.edu Thu Jun 11 15:15:58 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 11 Jun 2009 15:15:58 -0700 Subject: Comment tylan2 SNF 2009-06-04 10:28:49: uniformity issues Message-ID: test came out a bit better From seymour at snf.stanford.edu Fri Jun 12 08:58:57 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 12 Jun 2009 08:58:57 -0700 Subject: Problem tylan2 SNF 2009-06-11 15:02:05: Water inside of the tube Message-ID: ran wet700 recipe loaded in slave computer. Temp was stable at 700 and no water seen when loader came out. Tube idles at 800 for most recipes and perhaps not enough time given to allow temp to stabalize before running the 700 recipe. From alsune at snf.stanford.edu Fri Jun 26 23:35:34 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Fri, 26 Jun 2009 23:35:34 -0700 Subject: Problem tylan2 SNF 2009-06-26 23:35:33: Tylan2 wafer wand broken Message-ID: Someone broke the tylan2 wand again. Had to abort process From shott at snf.stanford.edu Mon Jun 29 18:12:18 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 29 Jun 2009 18:12:18 -0700 Subject: Comment tylan2 SNF 2009-06-10 04:53:13: Wand chipped Message-ID: Wand replaced .... From shott at snf.stanford.edu Mon Jun 29 18:12:32 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 29 Jun 2009 18:12:32 -0700 Subject: Problem tylan2 SNF 2009-06-26 23:35:33: Tylan2 wafer wand broken Message-ID: Wand replaced ...