From latta at snf.stanford.edu Tue Mar 3 09:50:33 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Mar 2009 09:50:33 -0800 Subject: Problem tylan2 SNF 2009-02-26 06:24:42: one wafer cracked Message-ID: noted From latta at snf.stanford.edu Tue Mar 3 09:50:47 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Mar 2009 09:50:47 -0800 Subject: Comment tylan2 SNF 2009-02-27 15:31:23: started TLCCLEAN after quartz replacement Message-ID: Thanks, Ray From maurice at snf.stanford.edu Mon Mar 16 17:43:49 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 16 Mar 2009 17:43:49 -0700 Subject: Shutdown tylan2 SNF 2009-03-16 17:43:49: TEMPS=400 Message-ID: From maurice at snf.stanford.edu Mon Mar 16 18:01:48 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 16 Mar 2009 18:01:48 -0700 Subject: Shutdown tylan2 SNF 2009-03-16 17:43:49: TEMPS=400 Message-ID: reading normal now(!?!?) From maurice at snf.stanford.edu Wed Mar 18 10:19:58 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 18 Mar 2009 10:19:58 -0700 Subject: Comment tylan2 SNF 2009-03-18 10:19:58: TLC clean last night Message-ID: From emyers at snf.stanford.edu Wed Mar 18 14:09:24 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 18 Mar 2009 14:09:24 -0700 Subject: Comment tylan2 SNF 2009-03-18 14:09:24: MarchQuals ran 3/9/09 Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 960A, Std Dev = 4.4 Front Center = 976A, Std Dev = 5.6 Back Center = 984A, Std Dev = 5.7 Back = 1009A, Std Dev = 5.4 Average All = 986A From maurice at snf.stanford.edu Thu Mar 19 10:31:16 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 19 Mar 2009 10:31:16 -0700 Subject: Comment tylan2 SNF 2009-03-19 10:31:15: someone ran TLCCLEAN again Message-ID: Someone ran TLCCLEAN again last night. From masaharu at snf.stanford.edu Fri Mar 20 13:48:38 2009 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Fri, 20 Mar 2009 13:48:38 -0700 Subject: Comment tylan2 SNF 2009-03-20 13:48:37: found the tube in ready at 500degC Message-ID: I found the tube in ready mode at 500degC. The tube has to be back to 800degC. From masaharu at snf.stanford.edu Fri Mar 20 13:59:20 2009 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Fri, 20 Mar 2009 13:59:20 -0700 Subject: Comment tylan2 SNF 2009-03-20 13:59:19: very big variation in quals Message-ID: According to the quals on 3/18, both in-wafer and wafer-to-wafer variation are very large. I also observed non uniform oxidation recently. We may need inspection. From masaharu at snf.stanford.edu Fri Mar 20 14:00:24 2009 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Fri, 20 Mar 2009 14:00:24 -0700 Subject: Comment tylan2 SNF 2009-03-20 14:00:23: H TC in a bad shape Message-ID: H TC shows B, bad shape. We may need inspection. From tberg at snf.stanford.edu Mon Mar 23 08:50:40 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 23 Mar 2009 08:50:40 -0700 Subject: Comment tylan2 SNF 2009-03-20 14:00:23: H TC in a bad shape Message-ID: Corrected From alsune at snf.stanford.edu Fri Mar 27 00:19:03 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Fri, 27 Mar 2009 00:19:03 -0700 Subject: Problem tylan2 SNF 2009-03-27 00:19:03: Quartz vacuum tweezer broken Message-ID: Upon loading the wafers found out that vacuum tweezer for tylan 1&2 is broken From tberg at snf.stanford.edu Fri Mar 27 10:38:54 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 27 Mar 2009 10:38:54 -0700 Subject: Problem tylan2 SNF 2009-03-27 00:19:03: Quartz vacuum tweezer broken Message-ID: Replaced wand From tberg at snf.stanford.edu Fri Mar 27 10:39:27 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 27 Mar 2009 10:39:27 -0700 Subject: Comment tylan2 SNF 2009-03-20 13:48:37: found the tube in ready at 500degC Message-ID: See maurice message