Comment tylan2 SNF 2009-03-20 13:59:19: very big variation in quals

masaharu at snf.stanford.edu masaharu at snf.stanford.edu
Fri Mar 20 13:59:20 PDT 2009


According to the quals on 3/18,
both in-wafer and wafer-to-wafer variation are very large.
I also observed non uniform oxidation recently.
We may need inspection.




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