From latta at snf.stanford.edu Fri Oct 2 14:02:08 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Oct 2009 14:02:08 -0700 Subject: Comment tylan2 SNF 2009-10-02 14:02:07: Oct quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 938A, Std Dev = 38.9 Front Center = 941A, Std Dev = 7.3 Back Center = 961A, Std Dev = 6.4 Back = 980A, Std Dev = 6.3 Average All = 955A Note: Front wafer had a particle nonuniformity spot on the left side. From latta at snf.stanford.edu Fri Oct 2 14:07:09 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Oct 2009 14:07:09 -0700 Subject: Comment tylan2 SNF 2009-09-03 12:44:59: Sept quals Message-ID: archived From rostam at snf.stanford.edu Tue Oct 13 21:05:01 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Tue, 13 Oct 2009 21:05:01 -0700 Subject: Problem tylan2 SNF 2009-10-13 21:05:01: black particles inside the tube Message-ID: there are some black particles at the entrance of the tube From seymour at snf.stanford.edu Wed Oct 14 09:07:19 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 14 Oct 2009 09:07:19 -0700 Subject: Comment tylan2 SNF 2009-10-14 09:07:18: looked for black particulate matter. Message-ID: I opened the tube and looked at the tube opening for particles that were reported. None found and door seal lookes ok. User is running Tran LC clean at this time. From narii at snf.stanford.edu Wed Oct 14 16:22:29 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Wed, 14 Oct 2009 16:22:29 -0700 Subject: Shutdown tylan2 SNF 2009-10-14 16:22:29: MFS error :08 Message-ID: It shows MFS error :08. Hydrogen is not flowing From seymour at snf.stanford.edu Thu Oct 15 08:36:28 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 15 Oct 2009 08:36:28 -0700 Subject: Shutdown tylan2 SNF 2009-10-14 16:22:29: MFS error :08 Message-ID: slave computer was rebooted. Wet 800 loaded. Ran the recipe with no errors or faults. From seymour at snf.stanford.edu Thu Oct 15 08:38:58 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 15 Oct 2009 08:38:58 -0700 Subject: Problem tylan2 SNF 2009-10-13 21:05:01: black particles inside the tube Message-ID: I checked tube yesterday morning and found no black particles. A user was starting Trans LC recipe when I finished checking tube. From narii at snf.stanford.edu Thu Oct 15 14:37:34 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Thu, 15 Oct 2009 14:37:34 -0700 Subject: Problem tylan2 SNF 2009-10-15 14:37:33: MFS alarm : 08 Message-ID: MFS alarm 08 occured while running wet700 recipe. Seems like H2 flow has problem again. From seymour at snf.stanford.edu Thu Oct 15 14:48:41 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 15 Oct 2009 14:48:41 -0700 Subject: Problem tylan2 SNF 2009-10-15 14:37:33: MFS alarm : 08 Message-ID: tube alarming for H2 temp. found user running wet700. Wioth tube idling at 700 degrees I tried H2 flow and got alarm. Contacted Tystar and was advised to check H2 T/C voltage and found it to be 6.2 mV. Tystar advised to adjust R45 one turn clockwise and check operation. The MFS460 would then allow H2 to flow. From seymour at snf.stanford.edu Fri Oct 16 09:58:45 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 16 Oct 2009 09:58:45 -0700 Subject: Comment tylan2 SNF 2009-10-16 09:58:44: ran wet700 Message-ID: after adjusting I/O board on MFS460 to allow H2 flow at 700 degs I tested the tube. No alarms or errors, and recipe completed. From rshyam at snf.stanford.edu Fri Oct 23 03:28:22 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Fri, 23 Oct 2009 03:28:22 -0700 Subject: Problem tylan2 SNF 2009-10-23 03:28:21: 3rd TC shows 400 while first two show 800 C Message-ID: From tberg at snf.stanford.edu Fri Oct 23 06:30:24 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 23 Oct 2009 06:30:24 -0700 Subject: Problem tylan2 SNF 2009-10-23 03:28:21: 3rd TC shows 400 while first two show 800 C Message-ID: Cleaned TC contacts reading correctly now From tberg at snf.stanford.edu Fri Oct 23 06:30:47 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 23 Oct 2009 06:30:47 -0700 Subject: Comment tylan2 SNF 2009-10-16 09:58:44: ran wet700 Message-ID: noted From tberg at snf.stanford.edu Fri Oct 23 06:31:03 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 23 Oct 2009 06:31:03 -0700 Subject: Comment tylan2 SNF 2009-10-14 09:07:18: looked for black particulate matter. Message-ID: none found From fanpy at snf.stanford.edu Sat Oct 24 20:25:33 2009 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Sat, 24 Oct 2009 20:25:33 -0700 Subject: Problem tylan2 SNF 2009-10-24 20:25:32: vacuum wand broken Message-ID: There was a crack in the quartz and it can't provide vacuum to pick up wafers From tberg at snf.stanford.edu Mon Oct 26 10:08:36 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Oct 2009 10:08:36 -0700 Subject: Problem tylan2 SNF 2009-10-24 20:25:32: vacuum wand broken Message-ID: