From tberg at snf.stanford.edu Fri Dec 3 06:10:58 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 3 Dec 2010 06:10:58 -0800 Subject: Problem tylan2 SNF 2010-12-03 06:10:57: MFS alarms N2 Message-ID: From seymour at snf.stanford.edu Fri Dec 3 07:15:52 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 3 Dec 2010 07:15:52 -0800 Subject: Shutdown tylan2 SNF 2010-12-03 07:15:52: MFS460 locked up Message-ID: From seymour at snf.stanford.edu Fri Dec 3 08:20:21 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 3 Dec 2010 08:20:21 -0800 Subject: Problem tylan2 SNF 2010-12-03 06:10:57: MFS alarms N2 Message-ID: N2 alarm now silent From seymour at snf.stanford.edu Fri Dec 3 08:22:01 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 3 Dec 2010 08:22:01 -0800 Subject: Shutdown tylan2 SNF 2010-12-03 07:15:52: MFS460 locked up Message-ID: found MFS460 locked up due to 5 VDC too high. Controller not happy with 5.15 volts. Addjusted to 4.99 and system became functional. From latta at snf.stanford.edu Tue Dec 7 16:48:33 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Dec 2010 16:48:33 -0800 Subject: Comment tylan2 SNF 2010-12-07 16:48:33: Dec quals Message-ID: ET900 00:39:00 50 wafer spread (expect about 920A) Front = 966A, Std Dev = 3.9 Front Center = 976A, Std Dev = 5.3 Back Center = 988A, Std Dev = 5.2 Back = 1005A, Std Dev = 5.3 Average All = 984A From latta at snf.stanford.edu Tue Dec 7 16:48:45 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Dec 2010 16:48:45 -0800 Subject: Comment tylan2 SNF 2010-11-04 09:28:54: Nov Quals Message-ID: archived From xuanwu at snf.stanford.edu Wed Dec 8 02:25:12 2010 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Wed, 8 Dec 2010 02:25:12 -0800 Subject: Shutdown tylan2 SNF 2010-12-08 02:25:11: MFS Alarm Message-ID: Displays seems to indicate N2 leak. Wafers had already come out, so I hit Abort to get the furnace door to close. From xuanwu at snf.stanford.edu Wed Dec 8 03:02:50 2010 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Wed, 8 Dec 2010 03:02:50 -0800 Subject: Comment tylan2 SNF 2010-12-08 03:02:49: Re: MFS Alarm Message-ID: According to TyCom, MFS ERROR 08. OUTPUTS: N2 = 2.5, but in the lower right corner, it says G 0.0 From seymour at snf.stanford.edu Thu Dec 9 08:26:14 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 9 Dec 2010 08:26:14 -0800 Subject: Shutdown tylan2 SNF 2010-12-08 02:25:11: MFS Alarm Message-ID: No alarms, system operating normal. From seymour at snf.stanford.edu Thu Dec 9 08:26:53 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 9 Dec 2010 08:26:53 -0800 Subject: Comment tylan2 SNF 2010-12-08 03:02:49: Re: MFS Alarm Message-ID: MFS460 was in manual ok now From tberg at snf.stanford.edu Fri Dec 10 06:33:14 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 10 Dec 2010 06:33:14 -0800 Subject: Shutdown tylan2 SNF 2010-12-10 06:33:14: MFS alarms Message-ID: MFS alarms, Flow base ID error From seymour at snf.stanford.edu Fri Dec 10 11:57:33 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 10 Dec 2010 11:57:33 -0800 Subject: Comment tylan2 SNF 2010-12-10 11:57:32: running wet900 for a BOT Message-ID: replaced msf460 I/O board and checked operation. started recipe. From latta at snf.stanford.edu Fri Dec 10 15:44:37 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 10 Dec 2010 15:44:37 -0800 Subject: Comment tylan2 SNF 2010-12-10 11:57:32: running wet900 for a BOT Message-ID: Survived WET800 00:10:00 without mfc alarms. I'll take the furnace off of shutdown. From latta at snf.stanford.edu Fri Dec 10 15:46:33 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 10 Dec 2010 15:46:33 -0800 Subject: Shutdown tylan2 SNF 2010-12-10 06:33:14: MFS alarms Message-ID: Ray replaced I/O board in the mfs460 and my problems went away. Ray adjusted the mfc zeros and everything looked ok. WET800 run 00:10:00 without alarms From tberg at snf.stanford.edu Tue Dec 14 06:02:09 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Dec 2010 06:02:09 -0800 Subject: Shutdown tylan2 SNF 2010-12-14 06:02:08: display gone alarming Message-ID: