Shutdown tylan2 SNF 2010-12-08 02:25:11: MFS Alarm

xuanwu at snf.stanford.edu xuanwu at snf.stanford.edu
Wed Dec 8 02:25:12 PST 2010


Displays seems to indicate N2 leak.  Wafers had already come out, so I hit Abort to get the furnace door to close.




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