Problem tylan2 SNF 2010-02-08 22:48:54: vaccumm tweezer broken

zzp at snf.stanford.edu zzp at snf.stanford.edu
Mon Feb 8 22:48:55 PST 2010


i used it with great difficulty for the first few wafers but the head dropped out eventually at the 3rd wafer. It probably put some particles on my wafers because I saw some red rings on those wafers after oxidation. 




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