From latta at snf.stanford.edu Wed Jan 6 17:12:04 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 6 Jan 2010 17:12:04 -0800 Subject: Comment tylan2 SNF 2010-01-06 17:12:04: Jan quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 1041A, Std Dev = 12.4 Front Center = 1165A, Std Dev = 10.3 Back Center = 1243A, Std Dev = 10.5 Back = 1298A, Std Dev = 8.4 Average All = 1187A From latta at snf.stanford.edu Wed Jan 6 17:12:19 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 6 Jan 2010 17:12:19 -0800 Subject: Comment tylan2 SNF 2009-12-01 17:37:02: Dec quals Message-ID: archived From latta at snf.stanford.edu Wed Jan 6 17:13:24 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 6 Jan 2010 17:13:24 -0800 Subject: Problem tylan2 SNF 2010-01-06 17:13:24: Qual thickness high Message-ID: I'm not sure what is going on. I noticed the next user had a 'big B' for the center tc.... From khoang at snf.stanford.edu Thu Jan 7 08:24:09 2010 From: khoang at snf.stanford.edu (khoang at snf.stanford.edu) Date: Thu, 7 Jan 2010 08:24:09 -0800 Subject: Problem tylan2 SNF 2010-01-07 08:24:09: thermal couple may have a problem Message-ID: I ran WET1100 this morning. As soon as the program went into step 35, the reading temperature was dropped to ~740C. After about 2 minutes the reading temperature was back to ~1070C. From seymour at snf.stanford.edu Thu Jan 7 10:29:26 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 7 Jan 2010 10:29:26 -0800 Subject: Problem tylan2 SNF 2010-01-07 08:24:09: thermal couple may have a problem Message-ID: fixed bad connection on center zone profile t/c. There is no longer a "B" on the tycom readout. From latta at snf.stanford.edu Thu Jan 7 17:21:59 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 7 Jan 2010 17:21:59 -0800 Subject: Comment tylan2 SNF 2010-01-07 17:21:59: Jan re-qual Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 929A, Std Dev = 5.6 Front Center = 959A, Std Dev = 7.1 Back Center = 981A, Std Dev = 6.0 Back = 1027A, Std Dev = 11.1 Average All = 974A From latta at snf.stanford.edu Thu Jan 7 17:22:50 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 7 Jan 2010 17:22:50 -0800 Subject: Problem tylan2 SNF 2010-01-06 17:13:24: Qual thickness high Message-ID: Ahhhhh, that's better. Re-qual ok. Back wafer thicker that the other three. From latta at snf.stanford.edu Thu Jan 7 17:22:59 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 7 Jan 2010 17:22:59 -0800 Subject: Comment tylan2 SNF 2010-01-06 17:12:04: Jan quals Message-ID: archived From latta at snf.stanford.edu Thu Jan 7 17:24:07 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 7 Jan 2010 17:24:07 -0800 Subject: Comment tylan2 SNF 2010-01-07 17:24:06: Back wafer 10%+ thicker than front three Message-ID: Source tc perhaps? From zpatel at snf.stanford.edu Fri Jan 15 10:16:40 2010 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Fri, 15 Jan 2010 10:16:40 -0800 Subject: Comment tylan2 SNF 2010-01-15 10:16:39: tylan 2: 10:30am - 1:00pm released Message-ID: Sorry for the short notice 10:30am -1:00 pm time released From maurice at snf.stanford.edu Tue Jan 19 09:53:54 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Jan 2010 09:53:54 -0800 Subject: Shutdown tylan2 SNF 2010-01-19 09:53:54: heating up after power outage Message-ID: From maurice at snf.stanford.edu Tue Jan 19 11:33:40 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Jan 2010 11:33:40 -0800 Subject: Shutdown tylan2 SNF 2010-01-19 09:53:54: heating up after power outage Message-ID: temp up