From latta at snf.stanford.edu Fri Jul 2 09:55:49 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Jul 2010 09:55:49 -0700 Subject: Problem tylan2 SNF 2010-07-02 09:55:48: Jul quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 907A, Std Dev = 7.9 Front Center = 951A, Std Dev = 8.0 Back Center = 978A, Std Dev = 6.8 Back = 1005A, Std Dev = 6.2 Average All = 960A From latta at snf.stanford.edu Fri Jul 2 09:55:58 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Jul 2010 09:55:58 -0700 Subject: Comment tylan2 SNF 2010-06-02 16:25:57: June quals Message-ID: archived From latta at snf.stanford.edu Fri Jul 2 09:56:42 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Jul 2010 09:56:42 -0700 Subject: Problem tylan2 SNF 2010-07-02 09:55:48: Jul quals Message-ID: Oppps that's a comment, not problem,,,, From latta at snf.stanford.edu Fri Jul 2 09:56:57 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Jul 2010 09:56:57 -0700 Subject: Comment tylan2 SNF 2010-07-02 09:56:57: July quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 907A, Std Dev = 7.9 Front Center = 951A, Std Dev = 8.0 Back Center = 978A, Std Dev = 6.8 Back = 1005A, Std Dev = 6.2 Average All = 960A From lyjiao at snf.stanford.edu Tue Jul 13 19:11:19 2010 From: lyjiao at snf.stanford.edu (lyjiao at snf.stanford.edu) Date: Tue, 13 Jul 2010 19:11:19 -0700 Subject: Problem tylan2 SNF 2010-07-13 19:11:18: Stuck on step 25 Message-ID: We used recipe DRY1050A Two time variables were entered, 01:30:00 for the oxidation step and 00:00:00 for the anneal step. However, it has been stuck on step 25, corresponding to anneal step in the recipe, for 2:45:41 at 7:15pm. Time-to-go reads 00:00:00 so the step should have ended. We disabled the machine, but the wafer is still in the tube, and the anneal step has not ended. From seymour at snf.stanford.edu Wed Jul 14 08:27:06 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 14 Jul 2010 08:27:06 -0700 Subject: Problem tylan2 SNF 2010-07-13 19:11:18: Stuck on step 25 Message-ID: loaded 1050A using 00:01:00 for variable for oxidation and aneal. Recipe ran normally. Problem used had was caused bu entering 00:00:00 for aneal setp. From ywidjaja at snf.stanford.edu Sat Jul 17 10:42:00 2010 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Sat, 17 Jul 2010 10:42:00 -0700 Subject: Comment tylan2 SNF 2010-07-17 10:41:59: MFS alarm Message-ID: MFS alarm during dry oxidation. Small 'b' next to center T/C too. Not sure if it's a problem or not. From seymour at snf.stanford.edu Mon Jul 19 11:04:18 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 19 Jul 2010 11:04:18 -0700 Subject: Comment tylan2 SNF 2010-07-19 11:04:18: I looked at mfs460 controller. Message-ID: I couldn't find a reason for MFS alarm. I took care of the small b on the center zone. From tberg at snf.stanford.edu Tue Jul 20 06:31:23 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 20 Jul 2010 06:31:23 -0700 Subject: Shutdown tylan2 SNF 2010-07-20 06:31:23: mfs alarms H2 leak Message-ID: From seymour at snf.stanford.edu Tue Jul 20 07:06:35 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 20 Jul 2010 07:06:35 -0700 Subject: Shutdown tylan2 SNF 2010-07-20 06:31:23: mfs alarms H2 leak Message-ID: checked and adjusted all MFS460 MFC's. Set O2 and H2 to0 1000 and 100.0% and checked flows. MFC's controlled at setpoint. From seymour at snf.stanford.edu Tue Jul 20 07:09:55 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 20 Jul 2010 07:09:55 -0700 Subject: Problem tylan2 SNF 2010-07-20 07:09:54: system has had H2-O2 alarms Message-ID: I checked flows after ,making sure MFC's were zeroed. O2, H2 and N2 flowed to setpoint. Will keep tube under abservation. From tberg at snf.stanford.edu Fri Jul 23 06:20:37 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 23 Jul 2010 06:20:37 -0700 Subject: Problem tylan2 SNF 2010-07-20 07:09:54: system has had H2-O2 alarms Message-ID: Ray adjusted zeros and checked flows- no problems since From tberg at snf.stanford.edu Fri Jul 23 06:20:52 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 23 Jul 2010 06:20:52 -0700 Subject: Comment tylan2 SNF 2010-07-19 11:04:18: I looked at mfs460 controller. Message-ID: Ray adjusted zeros and checked flows- no problems since From tberg at snf.stanford.edu Fri Jul 23 06:21:00 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 23 Jul 2010 06:21:00 -0700 Subject: Comment tylan2 SNF 2010-07-17 10:41:59: MFS alarm Message-ID: Ray adjusted zeros and checked flows- no problems since From rostam at snf.stanford.edu Sun Jul 25 18:45:53 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Sun, 25 Jul 2010 18:45:53 -0700 Subject: Problem tylan2 SNF 2010-07-25 18:45:53: TEMPC problem Message-ID: Tube is glowing white; ie temperature >1000C. Tycom says TEMPL = 972 TEMPC = 400 TEMPS = 1015 TEMPC is way off From rostam at snf.stanford.edu Sun Jul 25 18:47:03 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Sun, 25 Jul 2010 18:47:03 -0700 Subject: Shutdown tylan2 SNF 2010-07-25 18:47:02: Message-ID: From tberg at snf.stanford.edu Mon Jul 26 07:08:00 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Jul 2010 07:08:00 -0700 Subject: Problem tylan2 SNF 2010-07-25 18:45:53: TEMPC problem Message-ID: Cleaned and tightened TC connection on center zone reset TCU. Temp controlling OK now From tberg at snf.stanford.edu Mon Jul 26 07:08:21 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Jul 2010 07:08:21 -0700 Subject: Shutdown tylan2 SNF 2010-07-25 18:47:02: Message-ID: Cleaned and tightened TC connection on center zone reset TCU. Temp controlling OK now