From latta at snf.stanford.edu Wed Mar 3 16:00:43 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 Mar 2010 16:00:43 -0800 Subject: Comment tylan2 SNF 2010-03-03 16:00:43: Mar quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 929A, Std Dev = 14.4 Front Center = 980A, Std Dev = 12.2 Back Center = 1006A, Std Dev = 13.8 Back = 1034A, Std Dev = 8.5 Average All = 987A From latta at snf.stanford.edu Wed Mar 3 16:02:15 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 Mar 2010 16:02:15 -0800 Subject: Comment tylan2 SNF 2010-02-16 16:02:35: Feb quals Message-ID: archived From tberg at snf.stanford.edu Mon Mar 8 05:58:20 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Mar 2010 05:58:20 -0800 Subject: Comment tylan2 SNF 2010-03-08 05:58:20: Replaced vacuum wand Message-ID: From damodei at snf.stanford.edu Tue Mar 30 22:40:47 2010 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Tue, 30 Mar 2010 22:40:47 -0700 Subject: Problem tylan2 SNF 2010-03-30 22:40:47: oxidation rates are majorly messed up Message-ID: I ran the oxidation recipe WET1000 for 60 mins, which was supposed to give an oxide layer of 4000 A, but instead I got 700 A. I thought I might have made a mistake, so I tried the same recipe again (for a different amount of time) and again got 5x less than the desired amount. I suspect something is wrong with the flow of gases, as I watched the temp and it was fine. From seymour at snf.stanford.edu Wed Mar 31 09:10:56 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 31 Mar 2010 09:10:56 -0700 Subject: Problem tylan2 SNF 2010-03-30 22:40:47: oxidation rates are majorly messed up Message-ID: found H2 not turning on and giving a temp interlock message. Tightened t/c connections on I/O board as the temp was above H2 ignition temp. The H2 then came on with no alarms. will need testing after repair. From seymour at snf.stanford.edu Wed Mar 31 09:11:21 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 31 Mar 2010 09:11:21 -0700 Subject: Problem tylan2 SNF 2010-03-31 09:11:20: needs testing after repair. Message-ID: From latta at snf.stanford.edu Wed Mar 31 13:18:44 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 31 Mar 2010 13:18:44 -0700 Subject: Comment tylan2 SNF 2010-03-31 13:18:44: quals scheduled for tomorrow. Message-ID: