Problem tylan2 SNF 2010-03-30 22:40:47: oxidation rates are majorly messed up

damodei at snf.stanford.edu damodei at snf.stanford.edu
Tue Mar 30 22:40:47 PDT 2010


I ran the oxidation recipe WET1000 for 60 mins, which was supposed to give an oxide layer of 4000 A, but instead I got 700 A.  I thought I might have made a mistake, so I tried the same recipe again (for a different amount of time) and again got 5x less than the desired amount.  I suspect something is wrong with the flow of gases, as I watched the temp and it was fine.




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