From seymour at snf.stanford.edu Tue Nov 2 14:40:11 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 2 Nov 2010 14:40:11 -0700 Subject: Problem tylan2 SNF 2010-10-28 00:47:54: vaccum wand disappear Message-ID: noted From jaehlee at snf.stanford.edu Tue Nov 2 17:37:07 2010 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Tue, 2 Nov 2010 17:37:07 -0700 Subject: Problem tylan2 SNF 2010-11-02 17:37:07: MFS alarm Message-ID: H2/O2 read wrong. From latta at snf.stanford.edu Wed Nov 3 10:16:34 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 Nov 2010 10:16:34 -0700 Subject: Comment tylan2 SNF 2010-11-03 10:16:33: running TLCCLEAN Message-ID: to test all gases From latta at snf.stanford.edu Thu Nov 4 09:28:55 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 4 Nov 2010 09:28:55 -0700 Subject: Comment tylan2 SNF 2010-11-04 09:28:54: Nov Quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 983A, Std Dev = 2.8 Front Center = 991A, Std Dev = 5.3 Back Center = 1004A, Std Dev = 5.1 Back = 1020A, Std Dev = 5.5 Average All = 1000A From latta at snf.stanford.edu Thu Nov 4 09:29:12 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 4 Nov 2010 09:29:12 -0700 Subject: Comment tylan2 SNF 2010-10-01 17:37:43: Oct quals Message-ID: newer quals posted- archived From latta at snf.stanford.edu Thu Nov 4 09:29:58 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 4 Nov 2010 09:29:58 -0700 Subject: Problem tylan2 SNF 2010-10-19 01:20:40: Alarm on Message-ID: Furnace running well- we will observe the over temp light From latta at snf.stanford.edu Thu Nov 4 09:31:14 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 4 Nov 2010 09:31:14 -0700 Subject: Problem tylan2 SNF 2010-11-02 17:37:07: MFS alarm Message-ID: Furnace has been run repeatedly without this error occuring. Possible communication error between furnace and tycom. We will observe for further gas errors. From latta at snf.stanford.edu Thu Nov 4 09:31:31 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 4 Nov 2010 09:31:31 -0700 Subject: Comment tylan2 SNF 2010-11-03 10:16:33: running TLCCLEAN Message-ID: Ran without incident. From zzp at snf.stanford.edu Sat Nov 6 12:28:16 2010 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sat, 6 Nov 2010 12:28:16 -0700 Subject: Problem tylan2 SNF 2010-11-06 12:28:15: MFS alarmed twice Message-ID: during TLCCLEAN From wanglele501 at snf.stanford.edu Mon Nov 8 14:18:23 2010 From: wanglele501 at snf.stanford.edu (wanglele501 at snf.stanford.edu) Date: Mon, 8 Nov 2010 14:18:23 -0800 Subject: Problem tylan2 SNF 2010-11-08 14:18:23: MFS alarm Message-ID: Aborted the process From seymour at snf.stanford.edu Mon Nov 8 15:13:10 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 8 Nov 2010 15:13:10 -0800 Subject: Problem tylan2 SNF 2010-11-08 14:18:23: MFS alarm Message-ID: I checked tube status and found mfs alarm for n2 flow higher then setpoint. Checked and adjusted all MFC zeros. did the auto zero routine and checked flow to setpoint and it was right on. From seymour at snf.stanford.edu Mon Nov 8 15:16:31 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 8 Nov 2010 15:16:31 -0800 Subject: Problem tylan2 SNF 2010-11-06 12:28:15: MFS alarmed twice Message-ID: With no indication of the type of MFC alarm it is very difficult to find the problem. For a flow controller problem 6the graphic panel will flash the MFC led that has a problem, even after the alarm silence has been pushed if the condition still exists. This information allows faster response to the problem From ludwig at snf.stanford.edu Tue Nov 9 12:11:03 2010 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Tue, 9 Nov 2010 12:11:03 -0800 Subject: Shutdown tylan2 SNF 2010-11-09 12:11:02: N2 Flow Message-ID: From seymour at snf.stanford.edu Tue Nov 9 14:47:46 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 9 Nov 2010 14:47:46 -0800 Subject: Shutdown tylan2 SNF 2010-11-09 12:11:02: N2 Flow Message-ID: the N2 flow is stable and at setpoint at this time. I am removing the shutdown but leaving the tool in problem condition. I will keep observing the tool for stability. From seymour at snf.stanford.edu Tue Nov 9 14:51:44 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 9 Nov 2010 14:51:44 -0800 Subject: Problem tylan2 SNF 2010-11-09 14:51:44: Nitrogen flow issues Message-ID: The tube has experienced N2 faults and MFS alarms last couple of days. I haven't found the cause of this yet. But the tube is operating normally at this time. Please use with caution as N2 may fault again. From tberg at snf.stanford.edu Wed Nov 17 06:08:17 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 17 Nov 2010 06:08:17 -0800 Subject: Problem tylan2 SNF 2010-11-09 14:51:44: Nitrogen flow issues Message-ID: no problems in almost a week From latta at snf.stanford.edu Wed Nov 24 16:30:33 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 24 Nov 2010 16:30:33 -0800 Subject: Shutdown tylan2 SNF 2010-11-24 16:30:32: N2 leak error. Message-ID: MFS error 08 By tycom no N2 is flowing. And I can't shut off the audio alarm From seymour at snf.stanford.edu Mon Nov 29 07:51:15 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:51:15 -0800 Subject: Shutdown tylan2 SNF 2010-11-24 16:30:32: N2 leak error. Message-ID: checked 5 VDC supply found it to be 4.85 VDC, adjusted it to 5.15 VDC adjusted N2 mfc zero and did auto zero routine. N2 flowing to setpoint of 2.5 liters.