Problem tylan2 SNF 2010-11-08 14:18:23: MFS alarm

seymour at snf.stanford.edu seymour at snf.stanford.edu
Mon Nov 8 15:13:10 PST 2010


I checked tube status and found mfs alarm for n2 flow higher then setpoint. Checked and adjusted all MFC zeros. did the auto zero routine and checked flow to setpoint and it was right on.




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