Comment tylan2 SNF 2010-10-01 17:37:43: Oct quals

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Oct 1 17:37:43 PDT 2010


ET900  00:39:00  50 wafer spread
  (expect about 920A)
Front = 908A, Std Dev = 7.3
Front Center = 948A, Std Dev = 6.9
Back Center = 974A, Std Dev = 4.7
Back = 1000A, Std Dev = 4.7
Average All = 958A
Std dev much better than last month, but wafer-to-wafer uniformity is very close to out of spec.




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