From latta at snf.stanford.edu  Thu Sep  2 15:57:15 2010
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 2 Sep 2010 15:57:15 -0700
Subject: Comment tylan2 SNF 2010-09-02 15:57:14: Sept quals
Message-ID: <mailman.797.1356283651.4932.tylan2-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
  (expect about 920A)
Front = 811A, Std Dev = 31.4
Front Center = 884A, Std Dev = 29.3
Back Center = 938A, Std Dev = 25.0
Back = 996A, Std Dev = 18.8
Average All = 907A
Slightly out of spec.  Std dev worse.



From latta at snf.stanford.edu  Thu Sep  2 15:57:33 2010
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 2 Sep 2010 15:57:33 -0700
Subject: Comment tylan2 SNF 2010-08-03 16:20:21: Aug quals
Message-ID: <mailman.798.1356283651.4932.tylan2-pcs@snf.stanford.edu>

new quals posted



From zzp at snf.stanford.edu  Thu Sep  2 23:49:19 2010
From: zzp at snf.stanford.edu (zzp at snf.stanford.edu)
Date: Thu, 2 Sep 2010 23:49:19 -0700
Subject: Problem tylan2 SNF 2010-09-02 23:49:18: N2 leak alarm
Message-ID: <mailman.799.1356283651.4932.tylan2-pcs@snf.stanford.edu>

WET1000 run not successful, unable to silence the alarm



From seymour at snf.stanford.edu  Fri Sep  3 09:28:12 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 3 Sep 2010 09:28:12 -0700
Subject: Comment tylan2 SNF 2010-09-03 09:28:11: ran wet800
Message-ID: <mailman.800.1356283651.4932.tylan2-pcs@snf.stanford.edu>

checked and adjusted mfc zeros. did auto zero routine. Ran the recipe and all gas flow were correct and to setpoint.



From seymour at snf.stanford.edu  Tue Sep  7 08:08:52 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Tue, 7 Sep 2010 08:08:52 -0700
Subject: Problem tylan2 SNF 2010-09-02 23:49:18: N2 leak alarm
Message-ID: <mailman.801.1356283651.4932.tylan2-pcs@snf.stanford.edu>

N2 alarm problem has been addressed and tube not alarming any longer



From narii at snf.stanford.edu  Tue Sep 28 13:50:12 2010
From: narii at snf.stanford.edu (narii at snf.stanford.edu)
Date: Tue, 28 Sep 2010 13:50:12 -0700
Subject: Problem tylan2 SNF 2010-09-28 13:50:11: TCU error:04
Message-ID: <mailman.802.1356283651.4932.tylan2-pcs@snf.stanford.edu>

There was error while running TCL clean recipe.



From narii at snf.stanford.edu  Tue Sep 28 18:23:31 2010
From: narii at snf.stanford.edu (narii at snf.stanford.edu)
Date: Tue, 28 Sep 2010 18:23:31 -0700
Subject: Comment tylan2 SNF 2010-09-28 18:23:30: Temperature error?
Message-ID: <mailman.803.1356283651.4932.tylan2-pcs@snf.stanford.edu>

The temperature of the tube stays at the same(~1100C)  for hours, even if the set temperature is 800C. Seems like because of TCU error



From seymour at snf.stanford.edu  Wed Sep 29 07:27:47 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Wed, 29 Sep 2010 07:27:47 -0700
Subject: Problem tylan2 SNF 2010-09-28 13:50:11: TCU error:04
Message-ID: <mailman.804.1356283651.4932.tylan2-pcs@snf.stanford.edu>

element power off. checked SCR fan and reset breaker.element heating up at this ttime with no TCU errors.



From seymour at snf.stanford.edu  Wed Sep 29 07:29:08 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Wed, 29 Sep 2010 07:29:08 -0700
Subject: Comment tylan2 SNF 2010-09-28 18:23:30: Temperature error?
Message-ID: <mailman.805.1356283651.4932.tylan2-pcs@snf.stanford.edu>

temp reading not valid when element breaker off, reads las teemp captured