From ylyang at snf.stanford.edu Wed Feb 2 00:18:30 2011 From: ylyang at snf.stanford.edu (ylyang at snf.stanford.edu) Date: Wed, 2 Feb 2011 00:18:30 -0800 Subject: Problem tylan2 SNF 2011-02-02 00:18:30: motor problem in pull-in the furnace Message-ID: after finishing my run, the door was fully closed, but the machine is trying to keep closing the door. I can hear the rotating sound of the motor to pull-in the furnace. From tberg at snf.stanford.edu Wed Feb 2 06:38:35 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 2 Feb 2011 06:38:35 -0800 Subject: Problem tylan2 SNF 2011-02-02 00:18:30: motor problem in pull-in the furnace Message-ID: motor noise was from Tylan 3 stopped motor From seymour at snf.stanford.edu Thu Feb 3 15:07:19 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 3 Feb 2011 15:07:19 -0800 Subject: Comment tylan2 SNF 2011-02-03 15:07:19: LO O2 MFC issues Message-ID: The MFC had flow errors and could not reach the setpoint of 100 sccm. I adjusted the zero and checked flow at 100 and 200 sccm and flows were at setpoint and when off the flow showed zero flow. From ywidjaja at snf.stanford.edu Sat Feb 12 02:02:52 2011 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Sat, 12 Feb 2011 02:02:52 -0800 Subject: Problem tylan2 SNF 2011-02-12 02:02:52: MFS Error: 01 Message-ID: Process recipe: DRY850. Tycom shows MFS Error: 01. No O2LO and no O2HI. Abort run. From tberg at snf.stanford.edu Mon Feb 14 10:59:47 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 14 Feb 2011 10:59:47 -0800 Subject: Problem tylan2 SNF 2011-02-12 02:02:52: MFS Error: 01 Message-ID: MFS was in manual From xuanwu at snf.stanford.edu Tue Feb 22 04:12:29 2011 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Tue, 22 Feb 2011 04:12:29 -0800 Subject: Problem tylan2 SNF 2011-02-22 04:12:29: broken wafers upon boat out Message-ID: I had 2 primes and 1 SOI that broke at about the same place (~25 mm from the bottom of the wafer). I used the center carrier. They looked like they all had a notch around there, possible caused by the carrier. Previous processing had 1.2 um oxidation, and then oxide etch of very small features. There's now some silicon particles around the white tubes of this furnace from the broken wafers. Didn't know how to clean it, but didn't want to leave the furnace open. From wanglele501 at snf.stanford.edu Wed Feb 23 16:13:31 2011 From: wanglele501 at snf.stanford.edu (wanglele501 at snf.stanford.edu) Date: Wed, 23 Feb 2011 16:13:31 -0800 Subject: Problem tylan2 SNF 2011-02-23 16:13:29: Broken wafers Message-ID: The holder has problem. Leave notches on wafers and break many wafers. There are paticles from broken wafers on the holder.