Comment tylan2 SNF 2011-02-03 15:07:19: LO O2 MFC issues

seymour at snf.stanford.edu seymour at snf.stanford.edu
Thu Feb 3 15:07:19 PST 2011


The MFC had flow errors and could not reach the setpoint of 100 sccm.
I adjusted the zero and checked flow at 100 and 200 sccm and flows were at setpoint and when off the flow showed zero flow.




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