Problem tylan2 SNF 2011-02-22 04:12:29: broken wafers upon boat out

xuanwu at snf.stanford.edu xuanwu at snf.stanford.edu
Tue Feb 22 04:12:29 PST 2011


I had 2 primes and 1 SOI that broke at about the same place (~25 mm from the bottom of the wafer).  I used the center carrier.  They looked like they all had a notch around there, possible caused by the carrier.
Previous processing had 1.2 um oxidation, and then oxide etch of very small features.
There's now some silicon particles around the white tubes of this furnace from the broken wafers.  Didn't know how to clean it, but didn't want to leave the furnace open.




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