From seymour at snf.stanford.edu Fri Jan 7 13:25:37 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 7 Jan 2011 13:25:37 -0800 Subject: Shutdown tylan2 SNF 2010-12-14 06:02:08: display gone alarming Message-ID: controller returned form Tystar and has been installed. will leave tube under observation for a time. Ok to use with caution From seymour at snf.stanford.edu Fri Jan 7 13:27:52 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 7 Jan 2011 13:27:52 -0800 Subject: Problem tylan2 SNF 2011-01-07 13:27:51: returned controller installed Message-ID: Placing tool up with problem as controller returned and installed but needts to observed for a while. Use with caution From seymour at snf.stanford.edu Fri Jan 7 15:08:38 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 7 Jan 2011 15:08:38 -0800 Subject: Shutdown tylan2 SNF 2011-01-07 15:08:37: O2HI WILL NOT TURN ON Message-ID: The tube is enabled and I can give a setpoint but the solenoid valve donot energize. I checked coil and it appears to be good. I tried several times. O2 low will come on and there isn't a door interlock error on MSF460 just a flow error after 30 seconds when setpoint is not reached. From seymour at snf.stanford.edu Mon Jan 10 08:25:04 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 10 Jan 2011 08:25:04 -0800 Subject: Comment tylan2 SNF 2011-01-10 08:25:03: O2 now flows to setpoint Message-ID: replaced monoblock O2 solenoid and checcked flow. O2 and all gasesflow to setpoint. starting TLCLEAN, and will monitor reccipe. From seymour at snf.stanford.edu Mon Jan 10 11:44:07 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 10 Jan 2011 11:44:07 -0800 Subject: Shutdown tylan2 SNF 2011-01-07 15:08:37: O2HI WILL NOT TURN ON Message-ID: ran tlcclean and it completed. system checks out ok. From seymour at snf.stanford.edu Mon Jan 10 11:45:17 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 10 Jan 2011 11:45:17 -0800 Subject: Problem tylan2 SNF 2011-01-07 13:27:51: returned controller installed Message-ID: After O2HI solenoid was replaced all gases flowed to setpoint during tlcclean test. From latta at snf.stanford.edu Wed Jan 12 13:24:02 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 12 Jan 2011 13:24:02 -0800 Subject: Problem tylan2 SNF 2011-01-12 13:24:02: Growth rate low and deposition on tube Message-ID: I will have the actual numbers posted soon, but by visual inspection the oxide is thin. Also, there is a black deposition at the mounth of the tube. It was there prior to the qual run. From seymour at snf.stanford.edu Wed Jan 12 14:44:22 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 12 Jan 2011 14:44:22 -0800 Subject: Shutdown tylan2 SNF 2011-01-12 14:44:21: cooling down for pull and clean Message-ID: From seymour at snf.stanford.edu Thu Jan 13 14:06:18 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 13 Jan 2011 14:06:18 -0800 Subject: Shutdown tylan2 SNF 2011-01-12 14:44:21: cooling down for pull and clean Message-ID: pull and clean complete, running TLCCLEAN at this time. Tube will need test after recipe completes. From seymour at snf.stanford.edu Thu Jan 13 14:08:03 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 13 Jan 2011 14:08:03 -0800 Subject: Problem tylan2 SNF 2011-01-13 14:08:01: needs test after TLCCLEAN completes Message-ID: The pull and clean has been completed and TLCCLEAN is runniing now. From seymour at snf.stanford.edu Fri Jan 14 13:59:05 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 14 Jan 2011 13:59:05 -0800 Subject: Comment tylan2 SNF 2011-01-14 13:59:05: loader now off bottom of tube Message-ID: loader goes in and out without rubbing From maurice at snf.stanford.edu Fri Jan 14 17:42:38 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 14 Jan 2011 17:42:38 -0800 Subject: Comment tylan2 SNF 2011-01-14 17:42:37: qual test Message-ID: wet 900 00:39:00 expected ~1000 ang wafer1 avg 970 wafer1 avg 1033 wafer1 avg 10615 wafer1 avg 1113 From maurice at snf.stanford.edu Fri Jan 14 17:47:41 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 14 Jan 2011 17:47:41 -0800 Subject: Problem tylan2 SNF 2011-01-13 14:08:01: needs test after TLCCLEAN completes Message-ID: tlc and test complete From maurice at snf.stanford.edu Fri Jan 14 17:48:29 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 14 Jan 2011 17:48:29 -0800 Subject: Problem tylan2 SNF 2011-01-12 13:24:02: Growth rate low and deposition on tube Message-ID: growth rate close to expected value From maurice at snf.stanford.edu Mon Jan 24 12:04:17 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 24 Jan 2011 12:04:17 -0800 Subject: Problem tylan2 SNF 2011-01-24 12:04:16: thin oxide reported Message-ID: Fuse reports that he ran Wet1100 00:15:00 expected 2800Ang Actually got 840 ang (dry 1100 would give ~450) From seymour at snf.stanford.edu Mon Jan 24 13:54:02 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 24 Jan 2011 13:54:02 -0800 Subject: Shutdown tylan2 SNF 2011-01-24 13:54:02: installing another powersupply Message-ID: From seymour at snf.stanford.edu Tue Jan 25 08:15:16 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 25 Jan 2011 08:15:16 -0800 Subject: Shutdown tylan2 SNF 2011-01-24 13:54:02: installing another powersupply Message-ID: installed another power supply . adjuster O2LO mfc zero. all mfc's read zero with no flow. Turned on O2HI and H2 and they flowed ok. releasing tube for use. From maurice at snf.stanford.edu Thu Jan 27 09:39:33 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 27 Jan 2011 09:39:33 -0800 Subject: Problem tylan2 SNF 2011-01-24 12:04:16: thin oxide reported Message-ID: no reports of thin oxide after power supply replaced