From latta at snf.stanford.edu Wed Jun 1 17:09:16 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 1 Jun 2011 17:09:16 -0700 Subject: Comment tylan2 SNF 2011-05-05 14:47:12: May quals Message-ID: archived From latta at snf.stanford.edu Wed Jun 1 17:12:27 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 1 Jun 2011 17:12:27 -0700 Subject: Comment tylan2 SNF 2011-06-01 17:12:26: June quals- failed! Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 158A, Std Dev = 2.3 Front Center = 157A, Std Dev = 2.3 Back Center = 156A, Std Dev = 2.5 Back = 158A, Std Dev = 2.2 Average All = 157A This furnace should not be used for wet oxidation until further notice!! From latta at snf.stanford.edu Wed Jun 1 17:14:29 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 1 Jun 2011 17:14:29 -0700 Subject: Problem tylan2 SNF 2011-06-01 17:14:28: Failed wet ox qual Message-ID: Ok to use for dry ox. From seymour at snf.stanford.edu Thu Jun 2 08:52:11 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 2 Jun 2011 08:52:11 -0700 Subject: Shutdown tylan2 SNF 2011-06-02 08:52:10: unable to remove torch Message-ID: cooling down. From seymour at snf.stanford.edu Fri Jun 3 11:31:55 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 3 Jun 2011 11:31:55 -0700 Subject: Shutdown tylan2 SNF 2011-06-02 08:52:10: unable to remove torch Message-ID: pulled tube and replaced witha new one. Installed new torch. Installed t/c. Element breaker on, TLCCLEAN loaded and started. From seymour at snf.stanford.edu Fri Jun 3 11:33:22 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 3 Jun 2011 11:33:22 -0700 Subject: Comment tylan2 SNF 2011-06-03 11:33:22: running TLCCLEAN after repair Message-ID: From seymour at snf.stanford.edu Fri Jun 3 11:34:11 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 3 Jun 2011 11:34:11 -0700 Subject: Problem tylan2 SNF 2011-06-01 17:14:28: Failed wet ox qual Message-ID: Injector broken has been replaced From seymour at snf.stanford.edu Fri Jun 3 11:34:39 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 3 Jun 2011 11:34:39 -0700 Subject: Comment tylan2 SNF 2011-06-03 11:34:38: needs test after TLCCLEAN completed Message-ID: From latta at snf.stanford.edu Wed Jun 8 14:09:15 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 8 Jun 2011 14:09:15 -0700 Subject: Shutdown tylan2 SNF 2011-06-08 14:09:14: Cantilevers need adjusting Message-ID: The mixing chamber is not clearing the tube bottom. I needed to lift it up with the fork in order to close the door. Running TLCCLEAN program now.... From latta at snf.stanford.edu Wed Jun 8 14:39:03 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 8 Jun 2011 14:39:03 -0700 Subject: Comment tylan2 SNF 2011-06-08 14:39:03: Quals after torch repair Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 882A, Std Dev = 1.7 Front Center = 888A, Std Dev = 4.1 Back Center = 971A, Std Dev = 39.0 Back = 918A, Std Dev = 9.2 Average All = 915A From latta at snf.stanford.edu Wed Jun 8 14:39:24 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 8 Jun 2011 14:39:24 -0700 Subject: Comment tylan2 SNF 2011-05-24 08:33:14: replaced vac wand Message-ID: archived From latta at snf.stanford.edu Wed Jun 8 14:39:39 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 8 Jun 2011 14:39:39 -0700 Subject: Comment tylan2 SNF 2011-06-01 17:12:26: June quals- failed! Message-ID: new quals posted From latta at snf.stanford.edu Wed Jun 8 14:39:48 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 8 Jun 2011 14:39:48 -0700 Subject: Comment tylan2 SNF 2011-06-03 11:33:22: running TLCCLEAN after repair Message-ID: archived From latta at snf.stanford.edu Wed Jun 8 14:40:03 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 8 Jun 2011 14:40:03 -0700 Subject: Comment tylan2 SNF 2011-06-03 11:34:38: needs test after TLCCLEAN completed Message-ID: test done- results posted From seymour at snf.stanford.edu Fri Jun 10 07:34:48 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 10 Jun 2011 07:34:48 -0700 Subject: Comment tylan2 SNF 2011-06-10 07:34:48: Message-ID: waiting for rear burn chamber from vendor. From seymour at snf.stanford.edu Thu Jun 16 09:25:15 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 16 Jun 2011 09:25:15 -0700 Subject: Shutdown tylan2 SNF 2011-06-08 14:09:14: Cantilevers need adjusting Message-ID: installed new burn chamber and adjusted loader. ran TLCCLEAN From seymour at snf.stanford.edu Thu Jun 16 09:26:03 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 16 Jun 2011 09:26:03 -0700 Subject: Comment tylan2 SNF 2011-06-10 07:34:48: Message-ID: From seymour at snf.stanford.edu Thu Jun 16 09:26:30 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 16 Jun 2011 09:26:30 -0700 Subject: Problem tylan2 SNF 2011-06-16 09:26:30: needs qual after repair. Message-ID: From latta at snf.stanford.edu Thu Jun 16 16:47:07 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 16 Jun 2011 16:47:07 -0700 Subject: Problem tylan2 SNF 2011-06-16 09:26:30: needs qual after repair. Message-ID: qual completed- color looks good. Results will be posted soon From latta at snf.stanford.edu Fri Jun 17 14:10:26 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 17 Jun 2011 14:10:26 -0700 Subject: Problem tylan2 SNF 2011-06-17 14:10:26: Qual after repair- not uniform Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 881A, Std Dev = 3.1 Front Center = 932A, Std Dev = 13.3 Back Center = 1115A, Std Dev = 62.5 Back = 1084A, Std Dev = 60.6 Average All = 1003A From latta at snf.stanford.edu Fri Jun 17 14:20:45 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 17 Jun 2011 14:20:45 -0700 Subject: Comment tylan2 SNF 2011-06-17 14:20:44: torch mis-alignment? Message-ID: The quals show nonuniformity wafer-to-wafer. I noticed that the milky circle left on the mixing chamber is usually in the center. It is off to the right.... From latta at snf.stanford.edu Fri Jun 17 14:21:03 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 17 Jun 2011 14:21:03 -0700 Subject: Comment tylan2 SNF 2011-06-08 14:39:03: Quals after torch repair Message-ID: new quals posted From seymour at snf.stanford.edu Fri Jun 17 14:27:12 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 17 Jun 2011 14:27:12 -0700 Subject: Shutdown tylan2 SNF 2011-06-17 14:27:12: uniformity issues Message-ID: From seymour at snf.stanford.edu Tue Jun 21 10:18:10 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 21 Jun 2011 10:18:10 -0700 Subject: Shutdown tylan2 SNF 2011-06-17 14:27:12: uniformity issues Message-ID: checked O2 Nd H2 flows and they were close to setpoint of 1000 and 150. The door was adjusted to allow a flat contact with tube end. Needs testing. From seymour at snf.stanford.edu Tue Jun 21 10:18:40 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 21 Jun 2011 10:18:40 -0700 Subject: Problem tylan2 SNF 2011-06-21 10:18:39: needs testing after repair Message-ID: From latta at snf.stanford.edu Tue Jun 21 16:05:00 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 21 Jun 2011 16:05:00 -0700 Subject: Comment tylan2 SNF 2011-06-21 16:04:59: 2nd Qual after repair Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 843A, Std Dev = 2.9 Front Center = 886A, Std Dev = 5.0 Back Center = 921A, Std Dev = 8.8 Back = 881A, Std Dev = 9.3 Average All = 883A Much more uniform- put into green light mode. From latta at snf.stanford.edu Tue Jun 21 16:05:21 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 21 Jun 2011 16:05:21 -0700 Subject: Problem tylan2 SNF 2011-06-17 14:10:26: Qual after repair- not uniform Message-ID: new better qual From latta at snf.stanford.edu Tue Jun 21 16:05:35 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 21 Jun 2011 16:05:35 -0700 Subject: Comment tylan2 SNF 2011-06-17 14:20:44: torch mis-alignment? Message-ID: archived From latta at snf.stanford.edu Tue Jun 21 16:06:20 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 21 Jun 2011 16:06:20 -0700 Subject: Problem tylan2 SNF 2011-06-21 10:18:39: needs testing after repair Message-ID: Test completed, furnace put back to green From ywidjaja at snf.stanford.edu Mon Jun 27 03:37:55 2011 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Mon, 27 Jun 2011 03:37:55 -0700 Subject: Problem tylan2 SNF 2011-06-27 03:37:54: TEMPS reading is off? Message-ID: Was running WET850 recipe. TEMPS reading fluctuates a lot, sometimes as low as 500. From seymour at snf.stanford.edu Mon Jun 27 08:31:27 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 27 Jun 2011 08:31:27 -0700 Subject: Problem tylan2 SNF 2011-06-27 03:37:54: TEMPS reading is off? Message-ID: checcked t/c connections, reset TCU board. status theen shower rear zone too hot and other zones slightly hotter the3n setpoint. watched tube status untilall zones reached setpoint of 800.