From maurice at snf.stanford.edu Tue May 3 10:43:33 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 May 2011 10:43:33 -0700 Subject: Problem tylan2 SNF 2011-05-03 10:43:33: Big B load and center Message-ID: From seymour at snf.stanford.edu Tue May 3 11:16:19 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 3 May 2011 11:16:19 -0700 Subject: Problem tylan2 SNF 2011-05-03 10:43:33: Big B load and center Message-ID: removed cleaned and reinserted t/c plugs for profile t/c. checked status on tycom and all t/c's were "Bb" gone From seymour at snf.stanford.edu Tue May 3 14:31:13 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 3 May 2011 14:31:13 -0700 Subject: Shutdown tylan2 SNF 2011-05-03 14:31:12: profile t/c faulty Message-ID: From seymour at snf.stanford.edu Tue May 3 15:25:45 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 3 May 2011 15:25:45 -0700 Subject: Shutdown tylan2 SNF 2011-05-03 14:31:12: profile t/c faulty Message-ID: replaced profile t/c and entered temp deviations in tcu board. From latta at snf.stanford.edu Thu May 5 14:47:12 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 5 May 2011 14:47:12 -0700 Subject: Comment tylan2 SNF 2011-05-05 14:47:12: May quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 902A, Std Dev = 16.4 Front Center = 921A, Std Dev = 13.3 Back Center = 934A, Std Dev = 11.3 Back = 943A, Std Dev = 6.1 Average All = 925A From latta at snf.stanford.edu Thu May 5 14:47:23 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 5 May 2011 14:47:23 -0700 Subject: Comment tylan2 SNF 2011-04-01 16:09:46: April qual Message-ID: archived From latta at snf.stanford.edu Thu May 5 14:47:38 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 5 May 2011 14:47:38 -0700 Subject: Comment tylan2 SNF 2011-04-13 16:58:34: vaccum wand broken Message-ID: vac wand in good shape now. From narii at snf.stanford.edu Sat May 14 14:25:43 2011 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sat, 14 May 2011 14:25:43 -0700 Subject: Problem tylan2 SNF 2011-05-14 14:25:42: MFS error Message-ID: While running WET1000 RECIPE, MFS error occured at step 35. From seymour at snf.stanford.edu Mon May 16 08:13:35 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 16 May 2011 08:13:35 -0700 Subject: Problem tylan2 SNF 2011-05-14 14:25:42: MFS error Message-ID: alarming for O2LO not at zero. Checked out MFC zeros and adjusted zero on O2LO descrete MFC. Gave all MFC's a setpoint and flow gases at setpoint. From kokab at snf.stanford.edu Tue May 24 03:51:42 2011 From: kokab at snf.stanford.edu (kokab at snf.stanford.edu) Date: Tue, 24 May 2011 03:51:42 -0700 Subject: Problem tylan2 SNF 2011-05-24 03:51:41: dark spot on all of my wafers Message-ID: I don't know what exactly has happened during my run but it looks like that at one point there was a lot source of oxygen or heatat one point. there is a dark spot on my wafers and the darkness decreases from wafer to another wafer and at the end it is disappeared. From seymour at snf.stanford.edu Tue May 24 08:33:14 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 24 May 2011 08:33:14 -0700 Subject: Comment tylan2 SNF 2011-05-24 08:33:14: replaced vac wand Message-ID: also replaced front boat with a new one. From tberg at snf.stanford.edu Wed May 25 05:57:32 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 25 May 2011 05:57:32 -0700 Subject: Problem tylan2 SNF 2011-05-24 03:51:41: dark spot on all of my wafers Message-ID: It looks like issues were with wafers not the furnace. Boat and wand changed