Problem tylan2 SNF 2011-05-24 03:51:41: dark spot on all of my wafers

kokab at kokab at
Tue May 24 03:51:42 PDT 2011

I don't know what exactly has happened during my run but it looks like that at one point there was a lot source of oxygen or heatat one point. there is a dark spot on my wafers and the darkness decreases from wafer to another wafer and at the end it is disappeared.

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