From seymour at snf.stanford.edu Thu Sep 1 11:19:43 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 1 Sep 2011 11:19:43 -0700 Subject: Problem tylan2 SNF 2011-08-26 15:30:08: Lo O2 leak alarm Message-ID: not alarming at this time From seymour at snf.stanford.edu Thu Sep 1 11:20:25 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 1 Sep 2011 11:20:25 -0700 Subject: Problem tylan2 SNF 2011-08-26 17:46:37: persistent LoO2 leak alarm Message-ID: adjusted MFC zero. no longer alarming From seymour at snf.stanford.edu Thu Sep 1 11:22:11 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 1 Sep 2011 11:22:11 -0700 Subject: Problem tylan2 SNF 2011-08-30 15:08:58: Plug at the front of the tube sticking Message-ID: plug not dragging on tube end while loading. loader is up as far as it will go, and tube is as low as it will go. From seymour at snf.stanford.edu Thu Sep 1 11:22:37 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 1 Sep 2011 11:22:37 -0700 Subject: Comment tylan2 SNF 2011-08-09 06:35:02: backup t/c calibration complete Message-ID: noted From seymour at snf.stanford.edu Thu Sep 1 11:22:52 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 1 Sep 2011 11:22:52 -0700 Subject: Comment tylan2 SNF 2011-08-08 08:01:25: changed TCU board Message-ID: noted From latta at snf.stanford.edu Thu Sep 1 15:25:19 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 1 Sep 2011 15:25:19 -0700 Subject: Comment tylan2 SNF 2011-09-01 15:25:18: Sept quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 846A, Std Dev = 3.7 Front Center = 864A, Std Dev = 3.8 Back Center = 872A, Std Dev = 2.9 Back - wafer broke Average All = 861A From latta at snf.stanford.edu Thu Sep 1 15:25:30 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 1 Sep 2011 15:25:30 -0700 Subject: Comment tylan2 SNF 2011-08-05 17:26:20: Aug quals Message-ID: archived From mislam at snf.stanford.edu Sun Sep 4 01:01:16 2011 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sun, 4 Sep 2011 01:01:16 -0700 Subject: Problem tylan2 SNF 2011-09-04 01:01:16: MFS Alarm Message-ID: Wetox did not work. From seymour at snf.stanford.edu Wed Sep 7 12:00:28 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 7 Sep 2011 12:00:28 -0700 Subject: Comment tylan2 SNF 2011-09-07 12:00:28: I checked out H2 and O2 mfc's Message-ID: both flowed to setpoint. The H2 may be taking too long to reach setpoint causing a "flow not at setpoint alarm". I will try to speed up the MFC. From latta at snf.stanford.edu Wed Sep 7 16:14:57 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Sep 2011 16:14:57 -0700 Subject: Problem tylan2 SNF 2011-09-07 16:14:57: TLC not flowing Message-ID: During the TLC flow step of TLCCLEAN recipe O2HI, H2O2 and N2 CARRIER not flowing. Tycom shows NFS Error 01. No audio alarm. From latta at snf.stanford.edu Tue Sep 13 17:12:11 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 13 Sep 2011 17:12:11 -0700 Subject: Comment tylan2 SNF 2011-09-13 17:12:10: Qual after repairs Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 863A, Std Dev = 4.2 Front Center = 881A, Std Dev = 4.7 Back Center = not run Back = 894, Std Dev= 3.8 Average All = 879A From latta at snf.stanford.edu Tue Sep 13 17:12:32 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 13 Sep 2011 17:12:32 -0700 Subject: Comment tylan2 SNF 2011-09-01 15:25:18: Sept quals Message-ID: archived- new quals run From latta at snf.stanford.edu Tue Sep 13 17:12:56 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 13 Sep 2011 17:12:56 -0700 Subject: Problem tylan2 SNF 2011-09-04 01:01:16: MFS Alarm Message-ID: Ray and Ted repaired and observed From latta at snf.stanford.edu Tue Sep 13 17:13:19 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 13 Sep 2011 17:13:19 -0700 Subject: Comment tylan2 SNF 2011-09-07 12:00:28: I checked out H2 and O2 mfc's Message-ID: archived From latta at snf.stanford.edu Tue Sep 13 17:14:19 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 13 Sep 2011 17:14:19 -0700 Subject: Problem tylan2 SNF 2011-09-07 16:14:57: TLC not flowing Message-ID: quals after repair good- will observe TLCCLEAN on Thurs From sgchong at snf.stanford.edu Sun Sep 18 13:06:22 2011 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Sun, 18 Sep 2011 13:06:22 -0700 Subject: Problem tylan2 SNF 2011-09-18 13:06:22: O2 LO leak alarm Message-ID: I was passing by the tube and noticed an alarm. The O2 LO leak alarm is beeping, and the panel next to the tube says MFS alarm. From seymour at snf.stanford.edu Mon Sep 19 08:41:57 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 19 Sep 2011 08:41:57 -0700 Subject: Problem tylan2 SNF 2011-09-18 13:06:22: O2 LO leak alarm Message-ID: adjusted zero pot on discrete O2LO MFC. No longer have a O2LO leak alarm. From latta at snf.stanford.edu Thu Sep 29 16:31:18 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 29 Sep 2011 16:31:18 -0700 Subject: Problem tylan2 SNF 2011-09-29 16:31:18: mixing chamber scraping Message-ID: door alignment issue? (sorry, guys....) From latta at snf.stanford.edu Thu Sep 29 16:32:14 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 29 Sep 2011 16:32:14 -0700 Subject: Problem tylan2 SNF 2011-09-29 16:32:13: panel display gone to black Message-ID: