From dongrip at snf.stanford.edu Sat Apr 14 19:52:05 2012 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sat, 14 Apr 2012 19:52:05 -0700 Subject: Problem tylan2 SNF 2012-04-14 19:52:04: MFS alarm Message-ID: MFS alarm for H2 line during wet oxidation. The grown oxide is highly non-uniform across the wafer & across the tube. I don't know if the non-uniformiy comes from MFS alarm during the oxidation or other issues... From seymour at snf.stanford.edu Tue Apr 17 07:23:08 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 17 Apr 2012 07:23:08 -0700 Subject: Problem tylan2 SNF 2012-04-14 19:52:04: MFS alarm Message-ID: adjusted H2 MFC zero and did auto zero routine. From cachang at snf.stanford.edu Wed Apr 18 15:09:48 2012 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Wed, 18 Apr 2012 15:09:48 -0700 Subject: Comment tylan2 SNF 2012-04-18 15:09:48: Uniformity and growth rate? Message-ID: I ran WET1050 for 90mins. 8 wafers. From the calculation, I should get about 6500A oxide. The results I got were: 1. Inner wafer (away from the gate): 5920, std 70 2. middle wafer: 5820, std 117 3. outer wafer (close to the gate): 5600, std 152 From dongrip at snf.stanford.edu Thu Apr 19 23:16:39 2012 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Thu, 19 Apr 2012 23:16:39 -0700 Subject: Problem tylan2 SNF 2012-04-19 23:16:39: Non-uniform oxidation across wafer Message-ID: I grew oxides using the wet1000 recipe. The processing temperature was perfectly fine (all three indicated 1000), and no MFS alarm was observed during the entire run. However, I still observed highly non-uniform oxides across the wafer... From seymour at snf.stanford.edu Thu Apr 26 14:29:57 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 26 Apr 2012 14:29:57 -0700 Subject: Comment tylan2 SNF 2012-04-26 14:29:57: N2 is turned off and Argon is on Message-ID: From tberg at snf.stanford.edu Fri Apr 27 13:22:32 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 27 Apr 2012 13:22:32 -0700 Subject: Comment tylan2 SNF 2012-04-26 14:29:57: N2 is turned off and Argon is on Message-ID: Switched back to N2 after user finished From cachang at snf.stanford.edu Sat Apr 28 14:03:46 2012 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Sat, 28 Apr 2012 14:03:46 -0700 Subject: Comment tylan2 SNF 2012-04-28 14:03:45: Groth rate Message-ID: Ran WET950 for 15mins. Expected to have 800A. Got 625A with std = 40A.