Problem tylan2 SNF 2012-04-14 19:52:04: MFS alarm

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Sat Apr 14 19:52:05 PDT 2012


MFS alarm for H2 line during wet oxidation.
The grown oxide is highly non-uniform across the wafer & across the tube. I don't know if the non-uniformiy comes from MFS alarm during the oxidation or other issues...




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