Comment tylan2 SNF 2012-04-18 15:09:48: Uniformity and growth rate?

cachang at snf.stanford.edu cachang at snf.stanford.edu
Wed Apr 18 15:09:48 PDT 2012


I ran WET1050 for 90mins. 8 wafers. From the calculation, I should get about 6500A oxide. The results I got were:
1. Inner wafer (away from the gate): 5920, std 70
2. middle wafer: 5820, std 117
3. outer wafer (close to the gate): 5600, std 152




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