Problem tylan2 SNF 2012-04-19 23:16:39: Non-uniform oxidation across wafer

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Thu Apr 19 23:16:39 PDT 2012


I grew oxides using the wet1000 recipe. The processing temperature was perfectly fine (all three indicated 1000), and no MFS alarm was observed during the entire run. However, I still observed highly non-uniform oxides across the wafer...




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