From cachang at snf.stanford.edu Thu Aug 2 19:10:26 2012 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Thu, 2 Aug 2012 19:10:26 -0700 Subject: Problem tylan2 SNF 2012-08-02 19:10:25: MRS alarm Message-ID: Ran WET1050 for 90mins Target: 6500A oxide. Got 4088A, Std: 450A. Wafer to wafer variation was about 600A. From seymour at snf.stanford.edu Fri Aug 3 07:50:55 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 3 Aug 2012 07:50:55 -0700 Subject: Problem tylan2 SNF 2012-08-02 19:10:25: MRS alarm Message-ID: There was no indication of which gas was causing the alarm so I check them all. check and or adjusted flow controller zeros. gave them all a setpoint and flowed them to setpoint. N2 set at 2.50 flowed 2.51 O2 LO set at 200 flowed 201 O2HI set at 1000 flowed 1005 H2 set at 1.5X O2HI flowed 1535 N2 CARRIER set at 100 fl;owed at 100.3