Problem tylan2 SNF 2012-08-02 19:10:25: MRS alarm

cachang at snf.stanford.edu cachang at snf.stanford.edu
Thu Aug 2 19:10:26 PDT 2012


Ran WET1050 for 90mins
Target: 6500A oxide.
Got 4088A, Std: 450A.
Wafer to wafer variation was about 600A.




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