From price at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: price at snf.stanford.edu (price at snf.stanford.edu) Date: Apr 14, 2000 Subject: Problem tylan2: Tl indicates 400c during 1000c process Message-ID: From gaul at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Apr 14, 2000 Subject: Problem Clear tylan2: reset themocouple connection Message-ID: From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jun 2, 2000 Subject: Problem tylan2: Load side of hot zone bad; Ox thickness from source to load varies 1000A. Message-ID: From gaul at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Jun 5, 2000 Subject: Problem Clear tylan2: Reset t/c connection Message-ID: From pzwahlen at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: pzwahlen at snf.stanford.edu (pzwahlen at snf.stanford.edu) Date: Aug 31, 2000 Subject: Problem tylan2: Message-ID: at the end of my run the boat did not go back in the furnace. We had to push it manually back in! From gaul at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Sep 19, 2000 Subject: Problem Clear tylan2: not sure of problem Message-ID: From hector at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Problem tylan2 SNF 2012-08-16 13:34:54: cantilever arm alignment??? Message-ID: <11818568.102.1345149295455.JavaMail.coral@shine> 95% of my devices on my fragile wafer broke out of the wafer at one point in the travel of the cantilever arm on the way out of the tube. My devices are all sitting on the end of the quartz tube!! crap From seymour at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Problem tylan2 SNF 2012-08-16 13:34:54: cantilever arm alignment??? Message-ID: <3007631.105.1345150463737.JavaMail.coral@shine> I removed wafeer chips from end of the tube. I would bet on thermal stress on your wafer caused the destruction not loader alignment. From xuanwu at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Problem tylan2 SNF 2012-08-17 15:07:50: TEMPS bad reading Message-ID: <24065807.142.1345241271372.JavaMail.coral@shine> TEMPS reading is really low and fluctuates and has a small "b" next to it. From maurice at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Shutdown tylan2 SNF 2012-08-17 16:33:49: element braker off Message-ID: <22049270.175.1345246430175.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Shutdown tylan2 SNF 2012-08-17 16:33:49: element braker off Message-ID: <22703801.25.1345480223008.JavaMail.coral@shine> cooling water and breaker back on-at temp From tberg at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Problem tylan2 SNF 2012-08-17 15:07:50: TEMPS bad reading Message-ID: <30323454.26.1345480262367.JavaMail.coral@shine> cooling water and breaker back on-at temp From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Problem tylan2 SNF 2012-08-21 17:21:27: H2/O2 leak error Message-ID: <1683664.38.1345594888153.JavaMail.coral@shine> From seymour at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Problem tylan2 SNF 2012-08-21 17:21:27: H2/O2 leak error Message-ID: <24765628.44.1345652799743.JavaMail.coral@shine> ran 1000 sccm O2 and 1500 sccm H2 for 1 hour with no alarms or problems From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Problem tylan2 SNF 2012-08-23 18:15:10: Did not pass qual Message-ID: <7484024.95.1345770910720.JavaMail.coral@shine> Dry oxidations are ok, wet ox not so good. From seymour at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Problem tylan2 SNF 2012-08-23 18:15:10: Did not pass qual Message-ID: <24352238.119.1345827145629.JavaMail.coral@shine> replaced torch, found it to be loose in tube. hooked up calibrated flow meter inline with H2 and O2 to torch, O2 was a little high 1000 setpoint 1090 sccm flow. H2 flow 1540 setpoint 1500 sccm. needs tlcclean then test. From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Comment tylan2 SNF 2012-08-24 13:11:11: Aug qual- fail Message-ID: <18889566.146.1345839072330.JavaMail.coral@shine> WET900 00:39:00 50 wafer spread (expect about 920A) Front = 516A, Std Dev = 57.2 Front Center = 605A, Std Dev = 51.1 Back Center = 662A, Std Dev = 44.5 Back = 710A, Std Dev= 38.6 Average All = 623A From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Comment tylan2 SNF 2012-08-24 13:11:43: Needs qual- Use at your own risk Message-ID: <28073859.147.1345839103479.JavaMail.coral@shine> From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Comment tylan2 SNF 2012-07-06 17:18:36: July qual Message-ID: <20990956.148.1345839122627.JavaMail.coral@shine> newer qual posted From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Comment tylan2 SNF 2012-08-24 13:11:43: Needs qual- Use at your own risk Message-ID: <30930153.149.1345839136724.JavaMail.coral@shine> reposted From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Comment tylan2 SNF 2012-08-24 13:12:59: Needs qual after repairs Message-ID: <778073.150.1345839179973.JavaMail.coral@shine> Use at your own risk From pnataraj at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Problem tylan2 SNF 2012-09-08 14:36:49: Bad Thermocouple reading on Tcand Ts Message-ID: <12652916.85.1347140210491.JavaMail.coral@shine> From seymour at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Problem tylan2 SNF 2012-09-08 14:36:49: Bad Thermocouple reading on Tcand Ts Message-ID: <26286637.8.1347295155749.JavaMail.coral@shine> removed and reinserted TCU board and all t/c were reading correctly From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Problem tylan2 SNF 2012-10-31 14:30:15: thin growth rate Message-ID: <17135460.122.1351719016502.JavaMail.coral@shine> I don't have the measured results, but by eye the thickness is thin From seymour at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Comment tylan2 SNF 2012-11-01 09:00:37: ran WET900 for 30 mins Message-ID: <12230907.143.1351785638704.JavaMail.coral@shine> no problems found, door closed and door interlock was on. H2 and O2HI flowed at setpoint. From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Problem tylan2 SNF 2012-10-31 14:30:15: thin growth rate Message-ID: <293335.196.1351894963302.JavaMail.coral@shine> newer quals posted From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Comment tylan2 SNF 2012-08-24 13:12:59: Needs qual after repairs Message-ID: <9375841.197.1351895038320.JavaMail.coral@shine> newer quals posted From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Comment tylan2 SNF 2012-11-02 15:32:02: Message-ID: <21035327.198.1351895523518.JavaMail.coral@shine> WET900 00:39:00 50 wafer spread (expect about 920A) Front = 688A, Std Dev = 43.7 Front Center = 518A, Std Dev = 57.3 Back Center = 609A, Std Dev = 50.9 Back = not run Std Dev= not run Average All = 605A -------------------------------------------------------- after adjustments- -------------------------------------------------------- WET900 00:39:00 50 wafer spread (expect about 920A) Front = 438A, Std Dev = 69.9 Front Center = 509A, Std Dev = 66.5 Back Center = 598A, Std Dev = 56.3 Back = 656A, Std Dev= 47.8 Average All = 550A From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Comment tylan2 SNF 2012-11-01 09:00:37: ran WET900 for 30 mins Message-ID: <10703936.199.1351895555556.JavaMail.coral@shine> newer quals posted- still very thin ox growth From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Comment tylan2 SNF 2012-11-02 15:34:38: Nov qual & requal after adjustments- fail Message-ID: <10955013.200.1351895679606.JavaMail.coral@shine> WET900 00:39:00 50 wafer spread (expect about 920A) Front = 688A, Std Dev = 43.7 Front Center = 518A, Std Dev = 57.3 Back Center = 609A, Std Dev = 50.9 Back = not run Std Dev= not run Average All = 605A -------------------------------------------------------- after adjustments- -------------------------------------------------------- WET900 00:39:00 50 wafer spread (expect about 920A) Front = 438A, Std Dev = 69.9 Front Center = 509A, Std Dev = 66.5 Back Center = 598A, Std Dev = 56.3 Back = 656A, Std Dev= 47.8 Average All = 550A From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Comment tylan2 SNF 2012-11-02 15:32:02: Message-ID: <32723040.201.1351895693623.JavaMail.coral@shine> left off subject From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Comment tylan2 SNF 2012-08-24 13:11:11: Aug qual- fail Message-ID: <14201951.202.1351895714630.JavaMail.coral@shine> newer quals posted From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Comment tylan2 SNF 2012-11-02 15:38:38: Lo O2 alaram Message-ID: <1210446.204.1351895918779.JavaMail.coral@shine> From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Comment tylan2 SNF 2012-11-02 15:38:38: Lo O2 alaram Message-ID: <4376361.205.1351895935797.JavaMail.coral@shine> meant as a problem From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Problem tylan2 SNF 2012-11-02 15:39:07: lo O2 alarm Message-ID: <26566743.206.1351895947814.JavaMail.coral@shine> From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Comment tylan2 SNF 2012-11-02 15:46:10: Nov qual & requal after adjustment Message-ID: <28453380.208.1351896371979.JavaMail.coral@shine> WET900 00:39:00 50 wafer spread (expect about 920A) Front = 186A, Std Dev = 2.7 Front Center = 190A, Std Dev = 2.2 Back Center = 195A, Std Dev = 3.2 Back = 200A Std Dev= 2.2 Average All = 193A -------------------------------------------------------- after adjustments- -------------------------------------------------------- WET900 00:39:00 50 wafer spread (expect about 920A) Front = 684A, Std Dev = 10.5 Front Center = 737A, Std Dev = 4.1 Back Center = 799A, Std Dev = 5,3 Back = 865A, Std Dev= 3.0 Average All = 771A From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Comment tylan2 SNF 2012-11-02 15:46:10: Nov qual & requal after adjustment Message-ID: <19920787.209.1351896403996.JavaMail.coral@shine> meant for tylan3 From tberg at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Shutdown tylan2 SNF 2012-11-05 14:01:05: H2 flow issues Message-ID: <24221280.33.1352152866075.JavaMail.coral@shine> From seymour at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Shutdown tylan2 SNF 2012-11-05 14:01:05: H2 flow issues Message-ID: <30272759.6.1352328064740.JavaMail.coral@shine> H2 and O2 flow issues resolved both flow to recipe requirments. From seymour at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Problem tylan2 SNF 2012-11-02 15:39:07: lo O2 alarm Message-ID: <7082876.8.1352746052555.JavaMail.coral@shine> i did auto zero on the mfs460 no O2LO alarms since then From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Comment tylan2 SNF 2012-11-13 16:53:39: Qual after flow adjustments- still thin Message-ID: <32986216.25.1352854420463.JavaMail.coral@shine> WET900 00:39:00 50 wafer spread (expect about 920A) Front = 588A, Std Dev = 60.3 Front Center = 646A, Std Dev = 49.6 Back Center = 693A, Std Dev = 43.9 Back = 738A, Std Dev= 38.0 Average All =6661A From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Comment tylan2 SNF 2012-11-02 15:34:38: Nov qual & requal after adjustments- fail Message-ID: <13953436.29.1352854760218.JavaMail.coral@shine> newer qual posted- still has thin ox growth problem From insun at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: insun at snf.stanford.edu (insun at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Problem tylan2 SNF 2012-11-16 13:56:10: Thin oxide and bad uniformity Message-ID: <7783055.128.1353102971167.JavaMail.coral@shine> I ran WET1000 for 1hr25min to grow 4600A-thick thermal oxide, but the grown oxide was 3193.7A with standard deviation of 193A (measured using Woollam) From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Problem tylan2 SNF 2012-11-29 17:06:24: Dec Qual- FAIL Message-ID: <27528444.6.1354237585030.JavaMail.coral@shine> WET900 00:39:00 50 wafer spread (expect about 920A) Front = 508A, Std Dev = 66.3 Front Center = 601A, Std Dev = 57.0 Back Center = 657A, Std Dev = 51.4 Back = 705A, Std Dev= 43.1 Average All =618A From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Comment tylan2 SNF 2012-11-13 16:53:39: Qual after flow adjustments- still thin Message-ID: <10512420.7.1354237612289.JavaMail.coral@shine> newer qual poated From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Problem tylan2 SNF 2012-11-16 13:56:10: Thin oxide and bad uniformity Message-ID: <33534699.8.1354237662788.JavaMail.coral@shine> Dec qual supports this From seymour at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Shutdown tylan2 SNF 2012-11-30 06:59:53: cooling tube Message-ID: <17846274.12.1354287594012.JavaMail.coral@shine> thickness is too thin. From seymour at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Shutdown tylan2 SNF 2012-11-30 06:59:53: cooling tube Message-ID: <27449879.0.1354293797934.JavaMail.coral@shine> removed and checked torch, it was good. moved loader/door slightly to make better seal. tightened loader sheath oring screws. needs test From latta at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Problem tylan2 SNF 2012-11-30 10:55:25: Source TC at 400.0C Message-ID: <1913231.0.1354301725966.JavaMail.coral@shine> Tried to jiggle it at the connector- no soap From seymour at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Problem tylan2 SNF 2012-11-30 10:55:25: Source TC at 400.0C Message-ID: <30705273.9.1354312139900.JavaMail.coral@shine> pulled TCU board and cleaned contacts. reinserted board and reset board alarms. tube then showed correct temp. From anuarun at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: anuarun at snf.stanford.edu (anuarun at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Problem tylan2 SNF 2012-12-14 10:07:19: Status on machine Message-ID: <28432383.18.1355508439634.JavaMail.coral@shine> Status on the display near the furnace, READY or RUN is not displayed. From seymour at snf.stanford.edu Sun Dec 23 09:27:24 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:27:24 -0000 Subject: Problem tylan2 SNF 2012-12-14 10:07:19: Status on machine Message-ID: <7751710.20.1355512481775.JavaMail.coral@shine> the ready display was on when I went in to check it.