From latta at snf.stanford.edu Tue Feb 7 17:20:27 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Feb 2012 17:20:27 -0800 Subject: Shutdown tylan2 SNF 2011-12-09 15:54:37: temp issue Message-ID: solved From latta at snf.stanford.edu Tue Feb 7 17:20:44 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Feb 2012 17:20:44 -0800 Subject: Problem tylan2 SNF 2011-12-09 15:20:03: Tylan2 Message-ID: temp problem solved From latta at snf.stanford.edu Tue Feb 7 17:21:12 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Feb 2012 17:21:12 -0800 Subject: Comment tylan2 SNF 2012-02-07 17:21:11: Feb quals Message-ID: From latta at snf.stanford.edu Tue Feb 7 17:21:30 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Feb 2012 17:21:30 -0800 Subject: Comment tylan2 SNF 2012-02-07 17:21:11: Feb quals Message-ID: hummm, forgot to add the results.... From latta at snf.stanford.edu Tue Feb 7 17:24:11 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Feb 2012 17:24:11 -0800 Subject: Comment tylan2 SNF 2012-02-07 17:24:11: Feb quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 876A, Std Dev = 3.7 Front Center = 911A, Std Dev = 4.0 Back Center = not run Back = 990A, Std Dev= 9.3 Average All = 926A Uniformity wafer-to-wafer not good. From latta at snf.stanford.edu Tue Feb 7 17:24:29 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Feb 2012 17:24:29 -0800 Subject: Comment tylan2 SNF 2011-12-01 15:58:30: Dec quals Message-ID: newer quals run From latta at snf.stanford.edu Tue Feb 7 17:25:08 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Feb 2012 17:25:08 -0800 Subject: Problem tylan2 SNF 2012-02-07 17:25:08: wafer to waer uniformity over the 5% spec Message-ID: Temp issue? From seymour at snf.stanford.edu Thu Feb 9 11:20:49 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 9 Feb 2012 11:20:49 -0800 Subject: Comment tylan2 SNF 2012-02-09 11:20:49: checked injector Message-ID: looked okay. made sure injector fitting was tight. From latta at snf.stanford.edu Tue Feb 14 15:58:59 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 15:58:59 -0800 Subject: Comment tylan2 SNF 2012-02-14 15:58:58: Re-test of Feb quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 873A, Std Dev = 2.6 Front Center = 864A, Std Dev = 5.8 Back Center = 860A, Std Dev = 2.2 Back = 981A, Std Dev= 9.4 Average All = 895A Uniformity wafer-to-wafer still not good. From latta at snf.stanford.edu Tue Feb 14 15:59:11 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 15:59:11 -0800 Subject: Comment tylan2 SNF 2012-02-07 17:24:11: Feb quals Message-ID: newer quals posted From latta at snf.stanford.edu Tue Feb 14 15:59:35 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 15:59:35 -0800 Subject: Problem tylan2 SNF 2012-02-07 17:25:08: wafer to waer uniformity over the 5% spec Message-ID: new problem posted From latta at snf.stanford.edu Tue Feb 14 16:00:38 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 16:00:38 -0800 Subject: Problem tylan2 SNF 2012-02-14 16:00:38: Wafer-to-wafer uniformity still not good. Message-ID: I noticed that the source TC reads 400.0, but does show some TCU activity. From latta at snf.stanford.edu Thu Feb 16 10:37:37 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 16 Feb 2012 10:37:37 -0800 Subject: Problem tylan2 SNF 2012-02-14 16:00:38: Wafer-to-wafer uniformity still not good. Message-ID: Source tc ok now. I will run a thick (1um) oxidation and record results... From latta at snf.stanford.edu Fri Feb 17 17:22:57 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 17 Feb 2012 17:22:57 -0800 Subject: Comment tylan2 SNF 2012-02-17 17:22:56: Re-test of wafer uniformity using thicker ox Message-ID: WET1050A 02:15:00 50 wafer spread Front = 10940A, Std Dev = 36.3 Front Center = 8922A, Std Dev = 21.4 Back Center = 9206A, Std Dev = 74.3 Back = 10924A, Std Dev= 29.0 Average All = 9998A Uniformity wafer-to-wafer still not good. From latta at snf.stanford.edu Wed Feb 29 10:13:02 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 29 Feb 2012 10:13:02 -0800 Subject: Problem tylan2 SNF 2012-02-29 10:13:01: Getting I/O error at the tycom..... Message-ID: From latta at snf.stanford.edu Wed Feb 29 10:36:04 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 29 Feb 2012 10:36:04 -0800 Subject: Problem tylan2 SNF 2012-02-29 10:13:01: Getting I/O error at the tycom..... Message-ID: It's healed itself! Or some little elf in the background fixed it.... From latta at snf.stanford.edu Wed Feb 29 17:14:01 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 29 Feb 2012 17:14:01 -0800 Subject: Comment tylan2 SNF 2012-02-29 17:14:00: Mar (late Feb) quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 888A, Std Dev = 2.7 Front Center = 912A, Std Dev = 4.9 Back Center = 925A, Std Dev = 4.3 Back = 936A, Std Dev= 5.0 Average All = 915A From latta at snf.stanford.edu Wed Feb 29 17:14:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 29 Feb 2012 17:14:24 -0800 Subject: Comment tylan2 SNF 2012-02-09 11:20:49: checked injector Message-ID: archived From latta at snf.stanford.edu Wed Feb 29 17:14:33 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 29 Feb 2012 17:14:33 -0800 Subject: Comment tylan2 SNF 2012-02-14 15:58:58: Re-test of Feb quals Message-ID: archived From latta at snf.stanford.edu Wed Feb 29 17:14:44 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 29 Feb 2012 17:14:44 -0800 Subject: Comment tylan2 SNF 2012-02-17 17:22:56: Re-test of wafer uniformity using thicker ox Message-ID: archived