Comment tylan2 SNF 2012-02-17 17:22:56: Re-test of wafer uniformity using thicker ox

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Feb 17 17:22:57 PST 2012


WET1050A  02:15:00  50 wafer spread
  Front = 10940A, Std Dev = 36.3
Front Center = 8922A, Std Dev = 21.4
Back Center = 9206A, Std Dev = 74.3
Back = 10924A, Std Dev= 29.0
Average All = 9998A
Uniformity wafer-to-wafer still not good.




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