From tberg at snf.stanford.edu  Fri Jul  6 06:00:43 2012
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Fri, 6 Jul 2012 06:00:43 -0700
Subject: Problem tylan2 SNF 2012-06-30 18:40:41: MFS alarm during boat out
Message-ID: <mailman.1087.1356283654.4932.tylan2-pcs@snf.stanford.edu>

noted



From latta at snf.stanford.edu  Fri Jul  6 17:18:37 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 6 Jul 2012 17:18:37 -0700
Subject: Comment tylan2 SNF 2012-07-06 17:18:36: July qual
Message-ID: <mailman.1088.1356283654.4932.tylan2-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
  (expect about 920A)
Front = 871A, Std Dev = 3.7
Front Center = 902A, Std Dev = 5.2
Back Center = 918A, Std Dev = 5.0
Back = 932A, Std Dev= 5.5
Average All = 906A



From latta at snf.stanford.edu  Fri Jul  6 17:18:47 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 6 Jul 2012 17:18:47 -0700
Subject: Comment tylan2 SNF 2012-06-12 13:44:41: Jun qual
Message-ID: <mailman.1089.1356283654.4932.tylan2-pcs@snf.stanford.edu>

archived



From gsosa at snf.stanford.edu  Tue Jul 17 21:00:17 2012
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Tue, 17 Jul 2012 21:00:17 -0700
Subject: Shutdown tylan2 SNF 2012-07-17 21:00:17: H2 Fault 7/17
Message-ID: <mailman.1090.1356283654.4932.tylan2-pcs@snf.stanford.edu>

System shutdown for hydrogen fault during process.



From seymour at snf.stanford.edu  Wed Jul 18 08:02:00 2012
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Wed, 18 Jul 2012 08:02:00 -0700
Subject: Shutdown tylan2 SNF 2012-07-17 21:00:17: H2 Fault 7/17
Message-ID: <mailman.1091.1356283654.4932.tylan2-pcs@snf.stanford.edu>

I ran 1000 O2 and 150.0 H2 for 30 mins with no problems