From daesung at snf.stanford.edu Fri Mar 2 00:12:05 2012 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Fri, 2 Mar 2012 00:12:05 -0800 Subject: Problem tylan2 SNF 2012-03-02 00:12:04: MFC alarms Message-ID: From seymour at snf.stanford.edu Mon Mar 5 07:27:35 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 5 Mar 2012 07:27:35 -0800 Subject: Problem tylan2 SNF 2012-03-02 00:12:04: MFC alarms Message-ID: found no alarms when I checked the tube this morning. From seymour at snf.stanford.edu Thu Mar 15 11:25:22 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 15 Mar 2012 11:25:22 -0700 Subject: Comment tylan2 SNF 2012-03-15 11:25:22: replaced torch Message-ID: running tranlc clean From tberg at snf.stanford.edu Fri Mar 16 05:55:14 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 16 Mar 2012 05:55:14 -0700 Subject: Shutdown tylan2 SNF 2012-03-16 05:55:14: facilities tie ins Message-ID: From latta at snf.stanford.edu Fri Mar 16 14:15:55 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 16 Mar 2012 14:15:55 -0700 Subject: Shutdown tylan2 SNF 2012-03-16 05:55:14: facilities tie ins Message-ID: dane From latta at snf.stanford.edu Fri Mar 16 14:18:30 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 16 Mar 2012 14:18:30 -0700 Subject: Problem tylan2 SNF 2012-03-16 14:18:30: Qual not done after torch replaced Message-ID: Folks, I didn't get a chance to qual the furnace after the torch was replaced. The replacement was due to nonuniformity side-to-side within a wafer. Please use with caution (although I think the uniformity will be fine now) and chaeck your wafers. From latta at snf.stanford.edu Fri Mar 16 14:43:47 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 16 Mar 2012 14:43:47 -0700 Subject: Problem tylan2 SNF 2012-03-16 14:43:47: H2/O2 alarm Message-ID: Clearly a false alarm as the furnace was in idle. From maurice at snf.stanford.edu Mon Mar 19 12:51:26 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 19 Mar 2012 12:51:26 -0700 Subject: Shutdown tylan2 SNF 2012-03-19 12:51:26: hi temp Message-ID: Julie Segal reports that one zone was above 1200c. Aborted TLC clean but temp kept rising. Shut off breaker to tube From seymour at snf.stanford.edu Tue Mar 20 07:22:25 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 20 Mar 2012 07:22:25 -0700 Subject: Shutdown tylan2 SNF 2012-03-19 12:51:26: hi temp Message-ID: removed and cleaned contacts on TCU board. Turned on element breaker and started heating up. From seymour at snf.stanford.edu Tue Mar 20 07:24:19 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 20 Mar 2012 07:24:19 -0700 Subject: Problem tylan2 SNF 2012-03-16 14:43:47: H2/O2 alarm Message-ID: no H2/O2 alarms when I checked it. From latta at snf.stanford.edu Wed Mar 21 15:02:51 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 21 Mar 2012 15:02:51 -0700 Subject: Shutdown tylan2 SNF 2012-03-21 15:02:51: loader cable broken Message-ID: From seymour at snf.stanford.edu Thu Mar 22 10:57:35 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 22 Mar 2012 10:57:35 -0700 Subject: Shutdown tylan2 SNF 2012-03-21 15:02:51: loader cable broken Message-ID: replaced broken cable From seymour at snf.stanford.edu Fri Mar 23 15:00:08 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 23 Mar 2012 15:00:08 -0700 Subject: Problem tylan2 SNF 2012-03-23 15:00:07: found tube in alarm state H2/O2 alarm. Message-ID: It had been alarming for some trime. step 25. silenanced alarms checked controller operation . then found tube not enabled, so Oxygen and Hydrogen we3re interlocked to not flow causing alarms. a borted run. From latta at snf.stanford.edu Wed Mar 28 17:14:41 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Mar 2012 17:14:41 -0700 Subject: Problem tylan2 SNF 2012-03-16 14:18:30: Qual not done after torch replaced Message-ID: qual done From latta at snf.stanford.edu Wed Mar 28 17:15:02 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Mar 2012 17:15:02 -0700 Subject: Problem tylan2 SNF 2012-03-23 15:00:07: found tube in alarm state H2/O2 alarm. Message-ID: archived From latta at snf.stanford.edu Wed Mar 28 17:15:14 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Mar 2012 17:15:14 -0700 Subject: Comment tylan2 SNF 2012-03-15 11:25:22: replaced torch Message-ID: archived From latta at snf.stanford.edu Wed Mar 28 17:17:31 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Mar 2012 17:17:31 -0700 Subject: Comment tylan2 SNF 2012-03-28 17:17:30: April (late Mar) Qual Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 878A, Std Dev = 2.9 Front Center = 906A, Std Dev = 5.1 Back Center = 923A, Std Dev = 4.3 Back = 938A, Std Dev= 5.8 Average All = 911A From latta at snf.stanford.edu Wed Mar 28 17:17:41 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Mar 2012 17:17:41 -0700 Subject: Comment tylan2 SNF 2012-02-29 17:14:00: Mar (late Feb) quals Message-ID: archived