Problem tylan2 SNF 2012-03-16 14:18:30: Qual not done after torch replaced

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Mar 16 14:18:30 PDT 2012


Folks, I didn't get a chance to qual the furnace after the torch was replaced.  The replacement was due to nonuniformity side-to-side within a wafer.
Please use with caution (although I think the uniformity will be fine now) and chaeck your wafers.




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