From latta at snf.stanford.edu  Wed May  2 16:45:05 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 2 May 2012 16:45:05 -0700
Subject: Problem tylan2 SNF 2012-05-02 16:45:05: Qual- wafer-to-wafer nonuniform
Message-ID: <mailman.1073.1356283654.4932.tylan2-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
  (expect about 920A)
Front = 659A, Std Dev = 41.3
Front Center = 736A, Std Dev = 37.8
Back Center = 787A, Std Dev = 33.4
Back = 834A, Std Dev= 28.4
Average All = 754A



From latta at snf.stanford.edu  Wed May  2 16:45:34 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 2 May 2012 16:45:34 -0700
Subject: Comment tylan2 SNF 2012-03-28 17:17:30: April (late Mar) Qual
Message-ID: <mailman.1074.1356283654.4932.tylan2-pcs@snf.stanford.edu>

archived



From latta at snf.stanford.edu  Wed May  2 16:45:59 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 2 May 2012 16:45:59 -0700
Subject: Comment tylan2 SNF 2012-04-18 15:09:48: Uniformity and growth rate?
Message-ID: <mailman.1075.1356283654.4932.tylan2-pcs@snf.stanford.edu>

qual run



From latta at snf.stanford.edu  Wed May  2 16:46:17 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 2 May 2012 16:46:17 -0700
Subject: Problem tylan2 SNF 2012-04-19 23:16:39: Non-uniform oxidation across wafer
Message-ID: <mailman.1076.1356283654.4932.tylan2-pcs@snf.stanford.edu>

qual posted



From latta at snf.stanford.edu  Wed May  2 16:46:34 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 2 May 2012 16:46:34 -0700
Subject: Comment tylan2 SNF 2012-04-28 14:03:45: Groth rate
Message-ID: <mailman.1077.1356283654.4932.tylan2-pcs@snf.stanford.edu>

yep- new qual posted



From latta at snf.stanford.edu  Wed May 16 11:55:27 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 16 May 2012 11:55:27 -0700
Subject: Comment tylan2 SNF 2012-05-16 11:55:27: re-qual after door adjustment
Message-ID: <mailman.1078.1356283654.4932.tylan2-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
  (expect about 920A)
Front = 881A, Std Dev = 3.3
Front Center = 914A, Std Dev = 5.2
Back Center = 931A, Std Dev = 4.8
Back = 947A, Std Dev= 5.5
Average All = 918A



From latta at snf.stanford.edu  Wed May 16 11:55:47 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 16 May 2012 11:55:47 -0700
Subject: Problem tylan2 SNF 2012-05-02 16:45:05: Qual- wafer-to-wafer nonuniform
Message-ID: <mailman.1079.1356283654.4932.tylan2-pcs@snf.stanford.edu>

much better after door adjustment



From jparker at snf.stanford.edu  Wed May 23 11:11:19 2012
From: jparker at snf.stanford.edu (jparker at snf.stanford.edu)
Date: Wed, 23 May 2012 11:11:19 -0700
Subject: Comment tylan2 SNF 2012-05-23 11:11:18: 1/4 wafer in bottom of tube
Message-ID: <mailman.1080.1356283654.4932.tylan2-pcs@snf.stanford.edu>

Noticed a 1/4 wafer sitting in bottom of tube about 1' from the front during Boat In of my process. Doesn't interfere with boat motion at all.