From nlatta at stanford.edu  Wed Feb  6 18:14:22 2013
From: nlatta at stanford.edu (nlatta at stanford.edu)
Date: Wed, 6 Feb 2013 18:14:22 -0800 (PST)
Subject: [tylan2-pcs] Problem tylan2 SNF 2013-02-06 18:14:22: Qual after
	Door Alignment
Message-ID: <16946730.91.1360203262175.JavaMail.coral@snc-coraldb.stanford.edu>

WET900  00:39:00  50 wafer spread
  (expect about 920A)
Front = 682A, Std Dev = 45
Front Center = 723A, Std Dev = 43.5
Back Center = 762A, Std Dev = 38
Back = 815A, Std Dev= 30
Average All =746A
Thickness improvement, std dev still high, refractive index off and uniformity within a wafer 6-10%

From nlatta at stanford.edu  Thu Feb  7 10:35:50 2013
From: nlatta at stanford.edu (nlatta at stanford.edu)
Date: Thu, 7 Feb 2013 10:35:50 -0800 (PST)
Subject: [tylan2-pcs] Problem tylan2 SNF 2013-01-10 15:12:07: Jan qual -
 thin ox growth
Message-ID: <8493455.108.1360262150646.JavaMail.coral@snc-coraldb.stanford.edu>

newer quals posted

From nlatta at stanford.edu  Thu Feb  7 10:36:12 2013
From: nlatta at stanford.edu (nlatta at stanford.edu)
Date: Thu, 7 Feb 2013 10:36:12 -0800 (PST)
Subject: [tylan2-pcs] Problem tylan2 SNF 2013-01-23 13:55:58: very
 non-uniform & slow deposition
Message-ID: <29282508.109.1360262172703.JavaMail.coral@snc-coraldb.stanford.edu>

yep, still is....  Archived

From nlatta at stanford.edu  Thu Feb  7 10:36:33 2013
From: nlatta at stanford.edu (nlatta at stanford.edu)
Date: Thu, 7 Feb 2013 10:36:33 -0800 (PST)
Subject: [tylan2-pcs] Problem tylan2 SNF 2013-01-28 10:07:35: ne3eds
 thiscness test after loader rebuild
Message-ID: <12754637.110.1360262193758.JavaMail.coral@snc-coraldb.stanford.edu>

tested and posted

From nlatta at stanford.edu  Thu Feb  7 10:36:57 2013
From: nlatta at stanford.edu (nlatta at stanford.edu)
Date: Thu, 7 Feb 2013 10:36:57 -0800 (PST)
Subject: [tylan2-pcs] Comment tylan2 SNF 2013-01-28 14:48:08: clean
 completed, needs test
Message-ID: <11954150.111.1360262217819.JavaMail.coral@snc-coraldb.stanford.edu>

tested and posted

From rseymour at stanford.edu  Fri Feb  8 14:20:56 2013
From: rseymour at stanford.edu (rseymour at stanford.edu)
Date: Fri, 8 Feb 2013 14:20:56 -0800 (PST)
Subject: [tylan2-pcs] Problem tylan2 SNF 2013-02-08 14:20:56: doing a t/c
	calibration
Message-ID: <295845.15.1360362056552.JavaMail.coral@snc-coraldb.stanford.edu>


From rseymour at stanford.edu  Mon Feb 11 08:31:49 2013
From: rseymour at stanford.edu (rseymour at stanford.edu)
Date: Mon, 11 Feb 2013 08:31:49 -0800 (PST)
Subject: [tylan2-pcs] Problem tylan2 SNF 2013-02-08 14:20:56: doing a
	t/c calibration
Message-ID: <21726638.40.1360600309689.JavaMail.coral@snc-coraldb.stanford.edu>

temp cal completed.

From rseymour at stanford.edu  Mon Feb 11 14:29:09 2013
From: rseymour at stanford.edu (rseymour at stanford.edu)
Date: Mon, 11 Feb 2013 14:29:09 -0800 (PST)
Subject: [tylan2-pcs] Shutdown tylan2 SNF 2013-02-11 14:29:08: cooling down
 to check element packing
Message-ID: <22796229.61.1360621749353.JavaMail.coral@snc-coraldb.stanford.edu>

front zone not reaching temp

From rseymour at stanford.edu  Tue Feb 12 06:44:28 2013
From: rseymour at stanford.edu (rseymour at stanford.edu)
Date: Tue, 12 Feb 2013 06:44:28 -0800 (PST)
Subject: [tylan2-pcs] Shutdown tylan2 SNF 2013-02-11 14:29:08: cooling
 down to check element packing
Message-ID: <18394110.1.1360680268453.JavaMail.coral@snc-coraldb.stanford.edu>

shutdown by mistake yesterday