[tylan2-pcs] Problem tylan2 SNF 2013-02-06 18:14:22: Qual after Door Alignment

nlatta at stanford.edu nlatta at stanford.edu
Wed Feb 6 18:14:22 PST 2013


WET900  00:39:00  50 wafer spread
  (expect about 920A)
Front = 682A, Std Dev = 45
Front Center = 723A, Std Dev = 43.5
Back Center = 762A, Std Dev = 38
Back = 815A, Std Dev= 30
Average All =746A
Thickness improvement, std dev still high, refractive index off and uniformity within a wafer 6-10%


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