From popomoo at stanford.edu  Wed Jan 23 13:55:59 2013
From: popomoo at stanford.edu (popomoo at stanford.edu)
Date: Wed, 23 Jan 2013 13:55:59 -0800 (PST)
Subject: [tylan2-pcs] Problem tylan2 SNF 2013-01-23 13:55:58: very
 non-uniform & slow deposition
Message-ID: <29563231.98.1358978159389.JavaMail.coral@snc-coraldb.stanford.edu>

I ran the program "WET950" for 90min.
It was supposed to make 344nm of oxide, but the final result was 260nm.
The top part of wafers was approximately 280 nm, and the bottom part was about 240 nm.
Please take care of this issue.

From rseymour at stanford.edu  Wed Jan 23 14:13:08 2013
From: rseymour at stanford.edu (rseymour at stanford.edu)
Date: Wed, 23 Jan 2013 14:13:08 -0800 (PST)
Subject: [tylan2-pcs] Shutdown tylan2 SNF 2013-01-23 14:13:07: cooling down
 toi address uniformity issues
Message-ID: <26033865.99.1358979188423.JavaMail.coral@snc-coraldb.stanford.edu>


From rseymour at stanford.edu  Mon Jan 28 10:06:53 2013
From: rseymour at stanford.edu (rseymour at stanford.edu)
Date: Mon, 28 Jan 2013 10:06:53 -0800 (PST)
Subject: [tylan2-pcs] Shutdown tylan2 SNF 2013-01-23 14:13:07: cooling
 down toi address uniformity issues
Message-ID: <6423461.31.1359396413853.JavaMail.coral@snc-coraldb.stanford.edu>

rebuilt loader includind door seal.
installed loader 
running tlcclean
will need test after clean

From rseymour at stanford.edu  Mon Jan 28 10:07:35 2013
From: rseymour at stanford.edu (rseymour at stanford.edu)
Date: Mon, 28 Jan 2013 10:07:35 -0800 (PST)
Subject: [tylan2-pcs] Problem tylan2 SNF 2013-01-28 10:07:35: ne3eds
 thiscness test after loader rebuild
Message-ID: <14515251.32.1359396455951.JavaMail.coral@snc-coraldb.stanford.edu>


From rseymour at stanford.edu  Mon Jan 28 14:48:09 2013
From: rseymour at stanford.edu (rseymour at stanford.edu)
Date: Mon, 28 Jan 2013 14:48:09 -0800 (PST)
Subject: [tylan2-pcs] Comment tylan2 SNF 2013-01-28 14:48:08: clean
	completed, needs test
Message-ID: <21582335.42.1359413289306.JavaMail.coral@snc-coraldb.stanford.edu>