[tylan2-pcs] Problem tylan2 SNF 2013-01-23 13:55:58: very non-uniform & slow deposition

[popomoo at stanford.edu]

I ran the program "WET950" for 90min.
It was supposed to make 344nm of oxide, but the final result was 260nm.
The top part of wafers was approximately 280 nm, and the bottom part was about 240 nm.
Please take care of this issue.