[tylan2-pcs] Problem tylan2 SNF 2013-01-23 13:55:58: very non-uniform & slow deposition

popomoo at stanford.edu popomoo at stanford.edu
Wed Jan 23 13:55:59 PST 2013


I ran the program "WET950" for 90min.
It was supposed to make 344nm of oxide, but the final result was 260nm.
The top part of wafers was approximately 280 nm, and the bottom part was about 240 nm.
Please take care of this issue.


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