From rcandler at stanford.edu Fri Sep 6 17:50:41 2002 From: rcandler at stanford.edu (Rob Norris Candler) Date: Fri, 6 Sep 2002 17:50:41 -0700 (PDT) Subject: Tylan2 free until 20:30 9/6 Message-ID: switched my reservation to another tube From seymour at snf.stanford.edu Wed Sep 11 15:36:48 2002 From: seymour at snf.stanford.edu (Ray Seymour) Date: Wed, 11 Sep 2002 15:36:48 -0700 Subject: Shut down tube Message-ID: <3D7FC580.F67BFF39@snf.stanford.edu> I have shutdown tube 2 for H2/TCA and O2 lines to be pulled and checked. From latta at snf.stanford.edu Mon Sep 23 15:44:57 2002 From: latta at snf.stanford.edu (Nancy Latta) Date: Mon, 23 Sep 2002 15:44:57 -0700 Subject: Furnace 2 back in operation! Message-ID: <3D8F9969.D91A67FC@snf.stanford.edu> Folks, The s/s lines going to the tube have been replaced, the quartzware pulled and cleaned and a uniformity test has been run. Here are the results of the uniformity test; Wafer # Top Center Bottom Left Right Average 1-front 1377 1307 1359 1365 1364 1366A 2 1386 1382 1363 1372 1377 1376A 3 1383 1377 1363 1375 1377 1375A 4 1393 1394 1370 1381 1386 1385A 5 1394 1393 1375 1378 1390 1386A 6 1399 1399 1377 1384 1393 1390A 7 1409 1418 1388 1393 1406 1403A 8 1396 1388 1373 1381 1393 1386A 9 1408 1405 1388 1400 1397 1400A 10-back 1406 1409 1387 1398 1400 1400A -- Nancy Latta Stanford Nanofabrication Facility CIS Room 145 420 Via Palou Mall Stanford, CA 94305-4070 (650) 725-6727 latta at snf.stanford.edu