Furnace 2 back in operation!

Nancy Latta latta at snf.stanford.edu
Mon Sep 23 15:44:57 PDT 2002


Folks,

The s/s lines going to the tube have been replaced, the quartzware
pulled and cleaned and a uniformity test has been run.  Here are the
results of the uniformity test; 

Wafer #    Top     Center     Bottom     Left     Right    Average
1-front    1377    1307       1359       1365     1364     1366A
2          1386    1382       1363       1372     1377     1376A

3          1383    1377       1363       1375     1377     1375A
4          1393    1394       1370       1381     1386     1385A
5          1394    1393       1375       1378     1390     1386A
6          1399    1399       1377       1384     1393     1390A
7          1409    1418       1388       1393     1406     1403A

8          1396    1388       1373       1381     1393     1386A
9          1408    1405       1388       1400     1397     1400A
10-back    1406    1409       1387       1398     1400     1400A


-- 
Nancy Latta
Stanford Nanofabrication Facility
CIS Room 145 
420 Via Palou Mall
Stanford, CA 94305-4070
(650) 725-6727
latta at snf.stanford.edu



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