Oxide Uniformity in Tylans

Jim McVittie mcvittie at snf.stanford.edu
Tue Jul 8 13:36:16 PDT 2003


Tylan Users,

I am following-up on a thickness uniformity problem that was seen a few
month while back for dry oxidations in Tylan3. If you have thickness
uniformity results for any of the Tylan oxidization tubes from the pass
few months (May, June, July), I would love it if you would send me what
you have. Please include:

Tylan tube name:
Your name:
Date of Oxidation:
Process name:
Process conditions not in the process file:
Uniformity results:

    Thanks, Jim McVittie

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