two quartz boats

Qian Wang QWang at nano.com
Wed Dec 6 15:03:59 PST 2006


Hi, all tylan2 users,

 

Would you please keep two boats at the same position in the Tylan2
furnace.  I will run 50 wafers tomorrow. The uniformity is pretty good
from Nancy's run. She must have put the boats in correct position. 

 

Thanks a lot.

 

qian

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