From qqqwang at hotmail.com  Thu May 17 13:34:44 2007
From: qqqwang at hotmail.com (qian Wang)
Date: Thu, 17 May 2007 20:34:44 +0000
Subject: short crack of Tylan2
Message-ID: <BAY111-F19BB9EA28F6EF66E9FB6A2A1330@phx.gbl>

Hi,

there is a short crack at the entrance of tylan2 tube, my process is in 
running now. I will shut down the furnace after my wafers out.

qian

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