Tylan 2 uniformity issues

[Arash Hazeghi]

Hello Tylan users,

I used tylan2 to grow 300A°oxide (recipe: DRY900C time 1hr) last week, the
uniformity across one wafer and from wafer to wafer is horrible. One of the
wafers has 100A° thickness variation, about 33%! I have attached thickness
maps measured by Woolam, the wafers were loaded in the middle boat with flat
on the top.  I also used the same recipe with shorter time to re-grow oxide
on one of my wafers last month, again there was 40% variation and I had
throw out the wafer. Has anyone else noticed this issue? Is there a remedy? 

 

Thanks,

Arash

 

 

 

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Arash Hazeghi

 

PhD Candidate

Stanford Center for Integrated Systems

CIS-X 300, 420 Via Palou Mall, 

Stanford, CA 94305

 

phone: +1-650-725-0418

web: http://www.stanford.edu/~ahazeghi

 

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