Why vinyl gloves are bad for your wafers

Eric Perozziello eap at gloworm.Stanford.EDU
Sun Oct 4 14:08:09 PDT 2009




On Sun, 4 Oct 2009, John Shott wrote:

> > Something transferred to the wafer cold, and then
> > redistributed during the process, from the wand contact point.
>
> Of course, even if this adhesive gets a clean bill of health, there is
> nothing that would prevent other sources of contamination from getting
> on the tips.  Heck, I suppose that grabbing the tip of a vacuum wand
> with a "clean" vinyl glove could even transfer some plasticiser to a
> wafer that would likely result in non-uniformity .... or certainly there
> could be other ways of transferring contaminant to the end effector of
> the wand and then onto the wafers.


Like paint chips from where the wand is normally stored....

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