From caudillo at snf.stanford.edu Thu Oct 12 01:00:32 2000 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Oct 12, 2000 1:00:32 PM Subject: Problem tylan3: push/pull sticks Message-ID: From grupp at snf.stanford.edu Fri Oct 20 05:37:36 2000 From: grupp at snf.stanford.edu (grupp at snf.stanford.edu) Date: Oct 20, 2000 5:37:36 PM Subject: Problem tylan3: Message-ID: boat arm dragging along tube. From davehong at snf.stanford.edu Thu Oct 26 01:05:50 2000 From: davehong at snf.stanford.edu (davehong at snf.stanford.edu) Date: Oct 26, 2000 1:05:50 AM Subject: Problem tylan3: Message-ID: After my annealing, when I was unloading my wafers, I saw the side bar of the quartz wafer boat is broken and the bar was lying next to the furance door. It seems that the bar was broken from the boat during the annealing step and was pushed out along with the boat when the tube came out. I also saw that one of the 2 long beams that is underneath the wafer boat has fallen out from its proper location. I am not sure if the furnace door is completely shut, it seems to be a bit further out than other furnace doors. I left the broken rod from the wafer boat next to the tube. Dave From jgarate at snf.stanford.edu Thu Oct 26 08:30:48 2000 From: jgarate at snf.stanford.edu (jgarate at snf.stanford.edu) Date: Oct 26, 2000 8:30:48 AM Subject: Problem Clear tylan3: Replaced with new boat. Message-ID: From price at snf.stanford.edu Thu Oct 26 04:49:41 2000 From: price at snf.stanford.edu (price at snf.stanford.edu) Date: Oct 26, 2000 4:49:41 PM Subject: Problem tylan3: steam may not have come on WET900A Message-ID: From price at snf.stanford.edu Fri Oct 27 10:47:00 2000 From: price at snf.stanford.edu (price at snf.stanford.edu) Date: Oct 27, 2000 10:47:00 AM Subject: Problem tylan3: mfc prob. no steam 10/26 pm Message-ID: From seymour at snf.stanford.edu Mon Oct 30 11:08:32 2000 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 30, 2000 11:08:32 AM Subject: Problem Clear tylan3: H2 leak alarm reset zeroed H2 mfc Message-ID: From seymour at snf.stanford.edu Mon Oct 30 11:09:03 2000 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 30, 2000 11:09:03 AM Subject: Problem Clear tylan3: adjusted H2 alarm for MFC zero Message-ID: From seymour at snf.stanford.edu Mon Oct 30 11:09:26 2000 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 30, 2000 11:09:26 AM Subject: Problem Clear tylan3: Message-ID: From seymour at snf.stanford.edu Mon Oct 30 11:10:44 2000 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 30, 2000 11:10:44 AM Subject: Comment tylan3: need to replace loader bearings Message-ID: I will place order today From manjot at snf.stanford.edu Mon Oct 30 04:38:24 2000 From: manjot at snf.stanford.edu (manjot at snf.stanford.edu) Date: Oct 30, 2000 4:38:24 PM Subject: Shutdown tylan3: RAN WET1000 RECIPE BUT NO OXIDE GROWTH ON WAFERS Message-ID: